基于光切法的曲面划痕深度测量技术  

Depth Measurement of Scratches on the Curved Surface Based on Light-sectioning Method

作　　者：李慧鹏[1] 吕亚宁 孙业飞 唐若祥 刘缤艳 

机构地区：[1]北京航空航天大学仪器科学与光电工程学院,北京100191

出　　处：《光子学报》2017年第11期92-98,共7页Acta Photonica Sinica

基　　金：国家重大仪器设备开发专项(No.2013YQ040877)资助~~

摘　　要：提出了一种基于光切法的曲面划痕测量方法,相对传统光切法,能有效地提高划痕测量的精度.对传统光切法测量存在的不足进行分析,对曲面上划痕的测量误差进行分析建模及仿真.结果表明,传统光切法对曲面上划痕的测量误差会随着曲率半径和划痕宽度的变化而变化.实验选取不同曲率半径的精密零部件,对其表面的划痕进行测量.发现当曲率半径越小,划痕宽度越大,传统光切法对划痕深度测量的误差越大,而用本文所提方法测量的结果精度越高,当曲率半径小于10mm,划痕宽度大于283μm时,利用该方法能减小超过1μm的测量误差.A method for depth measurement of scratches on the curved surface using light-sectioning method is presented, which can improve the accuracy of scratches measurement compared with traditional light-sectioning method. The shortcomings of the traditional light-sectioning method were analyzed and the error of the scratches measurement on the curved surface was modeled and simulated. The results of the analysis and the simulation show that the error of the scratches on the curved surface varies with the radius of curvature and the width of the scratches using traditional light-sectioning method. The precision parts with different radius were selected in the experiment and the scratches on the curved surface were measured. Comparing with the large error of the conventional light-sectioning method, the accuracy of the results measured by this new method is higher when the radius of curvature is smaller and the width of the scratch is larger. The error of measurement less than lmm can be reduced by this new method when the radius of curvature is less than 10 mm and the scratch width is greater than 283 ram. This method can be applied to the depth measurement of scratches on the curved surface of the precision instrument.

关 键 词：光切法 划痕 曲面 测量误差 建模仿真 

分 类 号：TH741[机械工程—光学工程] TP391[机械工程—仪器科学与技术]