氮化碳超硬防划伤镀膜玻璃的制备与研究  

Preparation and Research of Anti-Scratch Glass Coated by Superhard CNx Film

作　　者：徐日宏 张忠义 张振华 王琦 姜宏 

机构地区：[1]深圳市三鑫精美特玻璃有限公司,广东惠州516083 [2]海南中航特玻科技有限公司,海南澄迈571924 [3]海南省特种玻璃重点实验室海南大学,海南海口570228

出　　处：《电镀与精饰》2017年第11期20-23,共4页Plating & Finishing

摘　　要：采用工业磁控溅射设备在玻璃基板上依次沉积Al_2O_3/SiO_2/CNx多层复合纳米薄膜,并研究测试了其透过率、耐划性及耐酸碱性。结果表明,通过引入线性阳极层离子源,控制并形成新的磁控溅射镀膜工艺,膜层莫氏硬度达到8级,具有优良的防刮效果;膜层存在△T>0.6%的微弱增透效果;经过酸/碱处理,透过率衰减|ΔT|<0.1%。The Al2O3/SiO2/CNx muhilayer nanocomposite films were deposited on glass substrates by industrial magnetron sputtering equipment, and its transmittance, scratch resistance, acid and alkali resist- ance were studied. The results showed that Mohs hardness of the films could reach up to level 8 and excel- lent scratch resistance could be obtained by introducing a linear anode layer ion source, controlling and forming a new magnetron sputtering coating technology;a weak anti-reflection effect of △T T 〉 0.6% was existed in the film layer; after acid/alkali treatment, the transmittance attenuation ｜△T｜ 〈 0. 1%.

关 键 词：氮化碳薄膜 磁控溅射 超硬膜层 防刮伤 透过率 耐酸耐碱性 

分 类 号：TB43[一般工业技术]