大倍率干涉显微物镜的光学系统设计  

Design of Optical System for Large Magnification Interference Microscope Objective

作　　者：孟涵[1] 万新军[1] 董一帆[1] 解树平 宾博逸 

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093

出　　处：《激光与光电子学进展》2017年第11期381-388,共8页Laser & Optoelectronics Progress

基　　金：国家重大科学仪器设备开发专项(2012YQ170004);国家自然科学基金(61505107)

摘　　要：干涉显微物镜是干涉测量显微镜的关键部件,在微纳表面三维形貌测量中应用广泛。设计了一款无限远共轭大倍率Mirau干涉显微物镜,其放大倍率为50×,数值孔径为0.5。基于系统长工作距的特性,干涉物镜采用反远距物镜结构。根据二级光谱理论,分析了干涉物镜的二级色差校正,合理选择了玻璃材料和初始结构。利用光学设计软件Code-V进行系统优化设计,设计结果表明,光学系统全视场范围内在800lp/mm处的调制传递函数大于0.3,其他各项指标满足设计要求。通过非序列模式建模对所设计的干涉物镜进行光线追迹,仿真分析得到清晰的牛顿环干涉图,结果验证了设计的合理性。Interference microscope objective is a key component of interferometric microscopy, which is widely used in the measurement of three-dimensional topography of micro-nano-surface. In this paper, an infinite conjugate large magnification Mirau interference microscope objective is designed, with the magnification ratio of up to 50 X and the numerical aperture of 0.5. Based on the characteristics of the long working distance of the system, the interference objective lens adopts the retrofocus objective structure. According to the second-order spectral theory, the secondary spectral aberration correction of the interference objective is analyzed, and the glass materials and lens initial structure are selected rationally. The optical system is optimized by utilizing the optical design software Code-V. The design results show that the modulation transfer function at 800 lp/mm is more than 0.3 in the whole field of view of the optical system, and other indexes all meet the design requirements. By non-sequential modeling, optical tracing of the designed interference objective is carried out, the clear Newton ring interferogram is obtained by simulation and analysis. Which proves the rationality of the design.

关 键 词：光学设计 Mirau干涉显微物镜 长工作距 二级光谱 干涉图 

分 类 号：O435[机械工程—光学工程] TN202[理学—光学]