玻璃微结构电解电火花铣削加工试验研究  

Experimental Investigation on Electrochemical Discharge Milling of Micro Structures on Quartz Glass

作　　者：王明宇[1] 张建华[1] 刘勇[1,2] 

机构地区：[1]山东大学机械工程学院高效洁净机械制造教育部重点实验室,济南250061 [2]山东大学力学与机电装备联合工程技术研究中心,山东威海264209

出　　处：《组合机床与自动化加工技术》2017年第11期99-102,共4页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：国家自然科学基金项目(51305238);中国博士后基金项目(2015M572023);山东大学(威海)青年学者未来计划资助项目(2015WHWLJH03)

摘　　要：为满足石英玻璃等非导电硬脆材料微结构的加工需求,对微细电解电火花铣削加工工艺进行了深入的试验研究,在玻璃工件上进行了一系列微细电解电火花铣削加工工艺试验。首先,基于电解电火花加工的原理搭建了微细电解电火花铣削试验平台;其次,通过对比试验,研究了加工电压、脉冲频率、占空比和进给速度等工艺参数对铣削槽宽的影响,并通过优化工艺参数加工出微槽阵列;最后,成功加工出多个玻璃微结构包括二维微流道和三维微结构,试验结果表明微细电解电火花铣削工艺在加工非导电硬脆材料微结构方面具有很大潜力。To satisfy the demand of the micro-structures on hard and non-conductive materials, the electrochemical discharge milling process is studied deeply by a series of machining experiments on glass. Firstly, the electrochemical discharge milling set-up has been built based on the machining principle. Secondly, series of experiments has been carried out to investigate the effect of applied voltage, frequency, duty factor, and feed rate on the channel width. And an array of micro-grooves is obtained by the optimized parameters. Finally, some complex micro-structures like micro-channels and 3D micro-structures on glass are fabricated successfully. The experimental results show that the electrochemical discharge milling has a great potential in the machining micro-structures on hard and nonconductive materials.

关 键 词：微细加工 电解电火花铣削 玻璃 微结构 

分 类 号：TH162[机械工程—机械制造及自动化] TG66[金属学及工艺—金属切削加工及机床]