多焦点激光分离厚透明材料  

Multi-Focus Laser Separation of Thick Transparent Materials

作　　者：上官赢 刘朋 张军军 白克强 段军[1] 

机构地区：[1]华中科技大学武汉光电国家实验室,湖北武汉430074

出　　处：《中国激光》2017年第11期97-104,共8页Chinese Journal of Lasers

基　　金：国家自然科学基金(51675205;51475182)

摘　　要：基于激光热裂纹控制法,提出了多焦点激光分离厚透明材料的方法。通过理论计算与ZEMAX软件模拟相结合的方式,设计了能形成三个焦点的光路系统,并利用该系统进行了夹层玻璃、磷酸二氢钾(KDP)晶体、超白玻璃等透明材料的切割分离实验。结果表明,利用该方法得到的表面平整光滑,无亚表面损伤,粗糙度小,有效解决了单个激光焦点热裂纹分离方法受材料厚度限制的问题,该方法具有很大的应用前景。Based on the laser controlled hot fracture method, a method of separating thick transparent materials with a multi-focus laser is proposed. The optical system which can support three focal points is designed by using the theoretical calculation and ZEMAX software simulation. The separation experiments of transparent materials including laminated glass, potassium dihydrogen phosphate （KDP） crystal and ultra clear glass are carried out by using this system. The results show that this method can obtain the flat and smooth cross section without sub- surface damage and with small roughness, which effectively solves the problem that the hot fracture separation method by a single laser locus is limited by the material thickness, and has great application prospects.

关 键 词：激光光学 激光切割分离 多焦点 透明材料 裂纹控制法 

分 类 号：TN24[电子电信—物理电子学]