拼接式反射镜共相误差检测  

Co-Phase Error Detection of Segmented Mirrors

作　　者：郑彬 陆培芬 陈永和[1,2] 傅雨田[1,2] 

机构地区：[1]中国科学院上海技术物理研究所,上海200083 [2]中国科学院红外成像与探测技术重点实验室,上海200083 [3]中国科学院大学,北京100049 [4]华东师范大学精密光谱科学与技术国家重点实验室,上海200062

出　　处：《光学学报》2017年第11期147-154,共8页Acta Optica Sinica

摘　　要：基于圆孔衍射理论,设计了一套拼接式反射镜的共相误差光学检测系统,并采用双波长窄带共相算法实现对合成孔径拼接镜的共相检测。方案中设计了圆孔掩模板、相位板和微棱镜阵列,通过数值仿真得到子镜间存在一系列台阶差时的圆孔衍射模板图样,再将待测图样与模板图样进行相关匹配,获得当前子镜间存在的台阶差。在将检测方案应用于拼接镜检测之前,通过相位板在光路中引入已知量相位差进行模拟实验,对衍射图样进行采样和匹配;实验结果验证了方案的可行性,可实现对合成孔径拼接面进行较高精度的共相检测。Based on the theory of aperture diffraction, a set of co-phase error optical detection system with segmented mirrors is designed, and the dual-wavelength narrow band co-phase algorithm is used to realize the co- phase detection of synthetic aperture segmented mirrors. In the scheme, circular aperture mask plate, phase difference plate and prism array have been designed for the system. By numerical simulation, a set of template pictures about the circular aperture diffraction with a series of different optical path differences have been obtained. Then, the correlation of the test image and template pictures will be figured out to calculate the optical path difference of the two adjacent sub-mirrors. Before applying the scheme to the segmented mirror detection, a known amount of phase difference in the optical path is introduced by phase plates to carry out the simulation, so that the diffraction patterns are sampled and matched. Results of the experiment verify the feasibility of the scheme, and high accuracy co-phase detection of the synthetic aperture segmented surface can be realized.

关 键 词：测量 圆孔衍射 共相检测 拼接镜面 合成孔径系统 

分 类 号：O436.1[机械工程—光学工程]