微型硅压阻式压力传感器研制  

Research and fabrication of micro silicon piezoresistive pressure sensor

作　　者：王永洪[1,2] 张明义[1,2] 高强[1] 王鹏[1] 

机构地区：[1]青岛理工大学土木工程学院,山东青岛266033 [2]蓝色经济区工程建设与安全协同创新中心青岛理工大学,山东青岛266033

出　　处：《传感器与微系统》2017年第11期106-108,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(51778312;41502304);山东省重点研发计划资助项目(GG201703200019);山东省自然科学基金青年科学基金资助项目(ZR2016EEP06)

摘　　要：结合多晶硅材料的压力敏感特性,通过在硅膜片上沉淀多晶硅压敏电阻及精密的微型化封装工艺,设计了微型硅压阻式土压力和孔隙水压力传感器。传感器通过将硅膜片在压力下的电阻值变化转换为电信号输出,通过标定实验得出:传感器的零点输出小,动态频响高,线性拟合度高,且适用于监测精度要求高的实际工程及受尺寸限制的室内模型试验。Combining pressure sensitive properties of polysilicon by depositting,polysilicon pressure sensitive resistance on Si diaphragm and precise micro packaging technology,micro silicon piezoresistive soil pressure and pore water pressure sensors is designed. The resistance change of the polysilicon diaphragm under pressure is transformed to electric signal output. Through calibration experiments,it is shown that the zero point output of the sensor is small,dynamic frequency response and linear fitting degree are high,which is suitable for high precision practical engineering and dimensional limit of indoor model test.

关 键 词：微型 硅压阻式 土压力 孔隙水压力 

分 类 号：TP216[自动化与计算机技术—检测技术与自动化装置]