扫描近场圆偏振光学显微镜  

Scanning near-field circular polarization optical microscope

作　　者：金涛[1] 谢孟宇 冀胡东 吴丹丹 郑继红[1] 

机构地区：[1]上海理工大学光电信息与计算机工程学院上海市现代化光学重点实验室,上海200093

出　　处：《红外与激光工程》2017年第11期26-30,共5页Infrared and Laser Engineering

基　　金：国家自然科学基金(51075280);上海市自然基金(16ZR1423000);国家基金委中德合作研究中心项目(GZ1287)

摘　　要：提出一种利用镀有金属薄膜的V形无孔光学探针构建的扫描近场光学显微镜,将圆偏振光注入镀有金属薄膜的V形槽内在针尖处形成近场照射光源,并利用探针收集样品表面近场光信号。理论分析表明:探针收集的近场和远场反射光之间存在一定的相位差,该相位差与探针机械结构、探针与样品的距离有关,可通过探针与样品之间的距离加以控制,因此利用偏振性器件可有效抑制远场光强。实验中,探针与样品之间的距离通过范德华力回馈控制,探针操作在接触模式,实验结果显示所测近场与远场光相位相差57°,近场光学图像横向分辨率优于12 nm。A scanning near-field optical microscope（SNOM） based on an apertureless optical probe was presented. The probe had a V shape hollow on its top and coated with metal film. Illumination near-field light（NFL） will emit from the apex of probe when far-field light（FFL） is focused on the hollow. There is a phase difference between collected NFL and FFL, which relates to the distance between probe and sample. The collected FFL can be eliminated using a Glan-Taylor analyzer according to the phase difference. The experimental results show the phase difference of this system is 57 °. The spatial resolution of SNCOM is less than 12 nm.

关 键 词：近场光学 无孔光学探针 扫描近场圆偏振光学显微镜 

分 类 号：O439[机械工程—光学工程]