Subsurface Damage of Monocrystalline Germanium Wafers by Fixed and Free Abrasive Lappings  

作　　者：Tang Suyang Sun Yuli Wang gong Li Jun Xu gang Liu Zhigang Zhu Yongwei Zuo Dunwen 

机构地区：[1]College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, P. R. China

出　　处：《Transactions of Nanjing University of Aeronautics and Astronautics》2017年第5期496-503,共8页南京航空航天大学学报（英文版）

基　　金：supported by the National Natural Science Foundation of China(No.51375237);the Postdoctoral Science Foundation of China(No.2015T80547)

摘　　要：The subsurface damage(SSD)layers of monocrystalline germanium wafers lapped by three different ways were measured and compared by the method of nanoindentation and micro morphology.Three ways such as ice-fixed abrasive,thermosetting fixed abrasive and free abrasive lappings are adopted to lap monocrystalline germanium wafers.The SSD depth was measured by a nanoindenter,and the morphology of SSD layer was observed by an atomic force microscopy(AFM).The results show that the SSD layer of monocrystalline germanium wafer is mainly composed of soft corrosion layer and plastic scratch and crack growth layer.Compared with thermosetting fixed abrasive and free abrasive lappings,the SSD depth lapped with ice-fixed abrasive is shallower.Moreover,the SSD morphology of monocrystalline germanium wafer lapped with ice-fixed abrasive is superior to those of two other processing ways.The subsurface damage （SSD） layers of monocrystalline germanium wafers lapped by three different ways were measured and compared by the method of nanoindentation and micro morphology. Three ways such as ice-fixed abrasive, thermosetting fixed abrasive and free abrasive lappings are adopted to lap monocrystalline ger manium wafers. The SSD depth was measured by a nanoindenter, and the morphology of SSD layer was observed by an atomic force microscopy（AFM）. The results show that the SSD layer of monocrystalline germanium wafer is mainly composed of soft corrosion layer and plastic scratch and crack growth layer. Compared with thermosetting fixed abrasive and free abrasive lappings, the SSD depth lapped with ice fixed abrasive is shallower. Moreover, the SSD morphology of monocrystalline germanium wafer lapped with ice fixed abrasive is superior to those of two oth- er processing ways.

关 键 词：subsurface damage(SSD) NANOINDENTATION fixed abrasive lapping monocrystalline germanium wafer 

分 类 号：O786[理学—晶体学] TN305.2[电子电信—物理电子学]