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机构地区:[1]西安工业大学电子信息工程学院,西安710021 [2]西安工业大学工业中心,西安710021 [3]西安工业大学机电工程学院,西安710021
出 处:《西安工业大学学报》2017年第8期628-633,共6页Journal of Xi’an Technological University
基 金:陕西省教育厅中试项目(09JC15);陕西省科技厅工业攻关项目(2009K07-08)
摘 要:为了提高测量电解在线砂轮修整磨削砂轮表面生成的氧化膜厚度的准确性,采用激光和涡流传感器及虚拟仪器组成测量系统,进行了氧化膜的模拟测试.通过测量系统和高精度电镜对模拟氧化膜厚度相同样点的测量数据进行比较,结果表明:激光和涡流传感器组成的测量系统实现了对氧化膜精确测量,测量相对误差小于0.66%;验证测量系统方案的可行性及静态测量结果的准确性.实现了氧化膜厚度的微米级别测量,且测量结果受机床的振动和加工环境影响;扩大了材料的测量范围,可对非均匀材料进行在线非接触测量.砂轮半径的磨损导致测量基准超出传感器测量范围;加在砂轮电极的电压影响涡流传感器的测量精度.In order to improve the measurement accuracy of oxide film thickness of EL1D grinding wheel surface,component measurement system is used by laser sensor, eddy current sensor and virtual instrument. The system is used to simulate the test of the oxide film. The measurement data of the same thickness of the oxide layers are compared by the measurement system and the high precision electron microscope. The results indicate that the relative error of the system measurement accuracy is less than 0.66%. The feasibility o{ the measurement system and the accuracy of the static measurement results are verified. Meanwhile, the sensors can meet the requirements of measurement of layers thickness in the range of millimeter-scale. However,the results are affected by vibration of machine tools and machining environment. The measurement range of the material is enlarged by the system. It can be used for on-line non-contact measurement of heterogeneous materials. The wear and tear of the grinding wheel radius is out of sensor measurement range. The voltage of the grinding wheel affects the measurement accuracy of the eddy current sensor.
分 类 号:TG743[金属学及工艺—刀具与模具]
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