Influence of Nitrogen Vacancy Concentration on Mechanical and Electrical Properties of Rocksalt Zirconium Nitride Films  

作　　者：Ke-Chang Han Guo-Qiang Lin Chuang Dong Kai-Ping Tai Xin Jiang 

机构地区：[1]Key Laboratory for Material Modification by Laser,Ion and Electron Beams,(Ministry of Education),Dalian University of Technology [2]Institute of Metal Research,Chinese Academy of Sciences

出　　处：《Acta Metallurgica Sinica(English Letters)》2017年第11期1100-1108,共9页金属学报（英文版）

基　　金：supported financially by the National Natural Science Foundation of China(No.51271047)

摘　　要：To study the influence of the nitrogen vacancy （VN） on mechanical and electrical properties of zirconium nitride deeply, ZrNx films with different VN concentrations were synthesized on the Si （111） substrates by enhanced magnetic filtering arc ion plating. The morphologies, microstructures, residual stresses, compositions, chemical states, mechanical and electrical properties of the as-deposited films were characterized by field-emission scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectrometry, Nanoindenter and Hall effect measurements. The results showed that ZrNx films exhibited rocksalt single-phase structure within a VN concentration ranging from 26 to 5%. The preferred orientation, thickness, grain size and residual stress of the ZrNx films kept constant at different VN concentrations. Both the nanohardness and elastic modulus first increased and then decreased with the decrease in VN concentration, reaching the peaks around 16%. And the electric conductivity of the ZrNx films showed a similar tendency with nanohardness. The underlying atomic-scale mechanisms of VN concentration-dependent hardness and electric conductivity enhancements were discussed and attributed to the different electronic band structures, rather than conventional meso-scale factors, such as preferred orientation, grain size and residual stress.To study the influence of the nitrogen vacancy （VN） on mechanical and electrical properties of zirconium nitride deeply, ZrNx films with different VN concentrations were synthesized on the Si （111） substrates by enhanced magnetic filtering arc ion plating. The morphologies, microstructures, residual stresses, compositions, chemical states, mechanical and electrical properties of the as-deposited films were characterized by field-emission scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectrometry, Nanoindenter and Hall effect measurements. The results showed that ZrNx films exhibited rocksalt single-phase structure within a VN concentration ranging from 26 to 5%. The preferred orientation, thickness, grain size and residual stress of the ZrNx films kept constant at different VN concentrations. Both the nanohardness and elastic modulus first increased and then decreased with the decrease in VN concentration, reaching the peaks around 16%. And the electric conductivity of the ZrNx films showed a similar tendency with nanohardness. The underlying atomic-scale mechanisms of VN concentration-dependent hardness and electric conductivity enhancements were discussed and attributed to the different electronic band structures, rather than conventional meso-scale factors, such as preferred orientation, grain size and residual stress.

关 键 词：ZrN_x films Nitrogen vacancy Hardness Electrical properties Band structure 

分 类 号：TB383.2[一般工业技术—材料科学与工程]