脉冲紫外激光刻蚀聚苯硫醚表面形貌的演变规律  

Micro-morphology evolution of polyphenylene sulfide textured by pulsed ultraviolet laser

作　　者：陈婷[1] 郑嘉怡 杜琦峰 刘建国[1] 曾晓雁[1] 

机构地区：[1]华中科技大学武汉光电国家实验室激光与太赫兹技术功能实验室,武汉430074 [2]湖南省长沙市长郡中学,长沙410002

出　　处：《功能材料》2017年第11期11174-11178,共5页Journal of Functional Materials

基　　金：国家自然科学基金面上资助项目(51473058);中国电子科技集团装备预研资助项目(6141B08120301)

摘　　要：为拓宽聚苯硫醚(PPS)的应用范围,选用波长为355nm的纳秒脉冲紫外激光对其进行表面改性,详细探讨了激光脉冲能量密度和光斑搭接率对PPS表面微观形貌的影响规律,并利用扫描电镜和表面探针轮廓仪对其进行了表征。结果表明,随着激光能量密度的增加(搭接率不变),激光与PPS的相互作用由光化学作用为主转变为光热协同作用,PPS表面由孔洞结构逐渐转变为熔融状结构,且表面粗糙度呈现先增大后减小再持续增加的趋势;在激光能量密度一定时,由于横向与纵向搭接引起的热积累不同,横向搭接率的增加(纵向搭接率保持不变)将导致PPS表面逐渐汽化,产生横向沟槽结构;而纵向搭接的增加(横向搭接率保持不变)主要使PPS表面点阵或沟槽结构逐渐被熔融物覆盖。In order to broaden the application of polyphenylene sulfide（PPS）,the surface modification of PPS was performed by a 355 nm-wavelength nanosecond pulsed ultraviolet laser in this paper.Two main parameters including laser fluence（LF）and spot overlap percentage（SOP）were selected to explore the surface micro-morphology evolution of PPS after laser texturing.It was characterized by scanning electron microscopy and surface probe profilometer.The results showed that with the increase of the LFs（keeping the SOP constant）,the interaction between the UV laser and PPS transferred from photochemical effect（when the LF is low）to synergistic effect of photochemical and photothermal（when the LF is high）,and the micro-morphology gradually evolved from porous microstructure to molten microstructure.Meanwhile,surface roughness firstly increased,then decreased,and finally showed a tendency to increase continuously.It was also found that the effect of horizontal and vertical SOP on surface micro-morphology was different.If the LF was kept constant,with the increase of the horizontal SOPs（keeping the vertical SOP constant）,grooves microstructure gradually appeared on the surface.On the other hand,with the increase of the vertical SOPs（keeping the horizontal SOP constant）,more and more molten masses were generated to cover the microwells and grooves.

关 键 词：脉冲紫外激光 聚苯硫醚 表面刻蚀 微观形貌 

分 类 号：O434.2[机械工程—光学工程]