基于激光位移传感器的面角度测量技术研究  

Study on the plane angle measurement technology based on aser displacement sensors

作　　者：彭希锋 陈爽[1] 李海星[1] 熊朝晖[1] 

机构地区：[1]中国工程物理研究院计量测试中心,绵阳621200

出　　处：《仪器仪表学报》2017年第11期2735-2743,共9页Chinese Journal of Scientific Instrument

基　　金：中国工程物理研究院技术基础(15S011)项目资助

摘　　要：针对面角度现场测试需求,利用激光位移传感器的漫反射测量特性,搭建了面角度非接触测量装置,提出了一种结合三坐标测量机和位置敏感探测器对激光位移传感器进行空间坐标化标定的方法,从而构建出精确的面角度测量模型;采用蒙特卡洛法对面角度非接触测量装置的不确定度进行评定,在±25°测量范围内其结果为U=0.044°~0.046°(k=2);通过性能验证试验、重复性试验和稳定性试验对装置的性能指标进行考核,在±25°测量范围内其绝对测量示值误差不超过0.036°,重复性不超过0.004°,稳定性不超过0.021°;实验结果表明该基于激光位移传感器的面角度非接触测量装置准确可靠,具备开展面角度现场测试应用的前景。Aiming at the plane angle in-site measurement requirement, a non-contact measuring device for plane angle is developed based on the diffuse reflection measurement features of the laser displacement sensors. The spatial coordinate calibration method of the laser displacement sensors are proposed that combines the coordinate measuring machine and position sensitive detector, an accurate measurement model for plane angle is constructed. The Montel Carlo method is used to evaluate the uncertainty of the plane angle non- contact measurement device, and the result is U = 0.044° - 0. 046° （k = 2） for the angle measurement range of ＋ 25°. The performance verification test, repeatability test and stability test were performed to examine the specifications of the non-contact measurement device. The results show that the absolute indication error, repeatability and stability of the device are less than 0. 036°, 0. 004° and 0. 021° respectively in the measurement range of -25°. The test results demonstrate that the non-contact measurement device for plane angle based on laser displacement sensors is accurate, reliable and has the application prospect for the in-site measurement of plane angle.

关 键 词：面角度 激光位移传感器 非接触测量 

分 类 号：TH74[机械工程—光学工程]