铝基微结构光栅几何参数反演  

Inverse estimation of geometric parameters of aluminum matrix microscale structure grating

作　　者：孙双成[1] 齐宏[1] 孙建平 阮世庭 吕中原 阮立明[1] 

机构地区：[1]哈尔滨工业大学能源科学与工程学院,哈尔滨150001 [2]上海卫星工程研究所,上海201100

出　　处：《北京航空航天大学学报》2017年第11期2199-2206,共8页Journal of Beijing University of Aeronautics and Astronautics

基　　金：国家自然科学基金(51476043)~~

摘　　要：微结构光栅是一种广泛应用的电子元件。采用随机微粒群优化(SPSO)算法反演了一维铝基衬底矩形光栅的几何结构参数。首先介绍了严格耦合波分析(RCWA)法和微粒群优化算法的基本原理,并采用RCWA法求解了光栅内电磁场问题;然后根据正问题求得的光栅光谱反射率建立目标函数,并采用SPSO算法优化目标函数,反演得到单槽和双槽矩形光栅的周期、凸脊宽度和凹槽深度;最后分析了种群大小和搜索区间对反演结果的影响。结果表明,SPSO算法可以准确地反演光栅几何结构参数,并推荐种群数取30。Micro structure grating is a widely used electronic component. The geometric parameters of one-dimensional rectangular aluminum matrix grating are inversely estimated using stochastic particle swarm optimization（ SPSO） algorithm. The theoretical overview of rigorous coupled wave analysis（ RCWA） algorithm and particle swarm optimization algorithm is introduced,and RCWA algorithm is employed to solve the electromagnetic field problem within grating. The objective function is formulated based on the spectral reflectance obtained by the direct problem,and then the SPSO algorithm is used to optimize the objective function.The geometric parameters such as the grating period,ridge width and groove depth are retrieved simultaneously. The effects of population size and searching space on the inverse estimation results are also investigated.The retrieval results show that SPSO algorithm is effective and robust for estimating geometric parameters of grating and the population size is suggested as 30.

关 键 词：光栅结构反演 随机微粒群优化(SPSO)算法 严格耦合波分析(RCWA)法 光谱反射率 辐射特性 

分 类 号：TK121[动力工程及工程热物理—工程热物理]