基于统一场追迹理论的激光扫描系统公差分析  

Tolerance Analysis of Laser Scanning System Based on Unified Field Tracing Theory

作　　者：高慧敏 房丰洲[1] 张效栋[1] 李楠[2] 

机构地区：[1]天津大学精密仪器与光电子工程学院,精密测试技术及仪器国家重点实验室,天津市微纳制造技术工程中心,天津300072 [2]天津航海仪器研究所,天津300131

出　　处：《激光与光电子学进展》2017年第12期198-206,共9页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(51320105009,61635008,51375337);高等学校学科创新引智计划(B07014)

摘　　要：激光扫描系统广泛应用于激光加工和激光成像等高精度系统中,其光学质量是制造过程最终的评价指标。在批量生产中,需要对光学系统进行公差分析,以满足使用需求,同时降低加工成本。以激光扫描系统为例,采用统一场光学分析对该光学系统进行仿真,结合激光扫描系统的光学性能,对系统各个元件间的位置误差和旋转误差进行公差分析。通过对每个元件进行公差约束,使整体系统满足设计和使用需求。搭建激光扫描系统的测量平台,验证了测量结果与统一场分析的一致性。Laser scanning system is widely used in high precision systems, such as laser machining and imaging. The optical quality is the final index of manufacture process. In mass production, the tolerance analysis of the optical system is needed to meet the demand of use and reduce processing cost. For example, the laser scanning system is simulated by the unified field optical analysis. The position tolerance and rotation tolerance of each workpiece of the system is analyzed based on the optical properties of the laser scanning systems. The overall system meets the design and uses requirements through tolerance constraints for each workpiece. The measurement platform is built, and the measurement result is consistent with the analysis of unified field tracing.

关 键 词：测量 激光扫描系统 公差分析 统一场追迹理论 光学性能 

分 类 号：O439[机械工程—光学工程] TN202[理学—光学]