测量不确定度在工作中的重要性及分析应用  

The Importance, Analysis and Application of Uncertainty of Measurement at Work

作　　者：李雪[1] 孙明睿[1] 杨宽[1] 巨莎娜 宋秀敏[1] 

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2017年第6期30-33,共4页Equipment for Electronic Products Manufacturing

摘　　要：对半导体装备领域零部件加工装配的测量器具进行具体分析,分析量具的测量不确定度以及它对半导体设备零部件及装配的重要影响,以半导体设备中应用最广泛的角度类量具检定装置为例,进行测量不确定度和校准能力的分析。In this article,the measuring apparatus using in the machining and assembling of components and parts of semiconductor equipment field are analyzed, and the uncertainty of measurement of the measuring apparatus and its Important influence in the machining and assembling of semiconductor equipment＇s components and parts are analyzed. Take the calibrating apparatus of angle measuring tools mostly used in semiconductor equipments as an example, uncertainty of measurement and Calibration capability are analyzed.

关 键 词：测量不确定度 测量误差 直角尺 校准测量能力 

分 类 号：TH741.2[机械工程—光学工程]