基于数字微镜器件的中阶梯光栅光谱仪的光学系统设计  

Optical system of echelle spectrometer based on DMD

作　　者：张锐[1,2] 潘明忠 杨晋[1,2] 巴音贺希格[1] 崔继承 ZHANG Rui;PAN Ming-zhong;YANG Jin;BAYANHESHIG;CUI Ji-cheng(Changchun Institute of Optics Chinese Academy of Sciences, 2. University of Chinese Academy of , Fine Mechanics and Physics, Changchun 130033, China;Sciences, Beijing 100049, Chin)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《光学精密工程》2017年第12期2994-3000,共7页Optics and Precision Engineering

基　　金：国家重大科学仪器设备开发专项项目(No.2014YQ120351);国家重大科研装备研制项目(No.ZDYZ2008-1);国家自然科学基金资助项目(No.61505204);吉林省科技发展计划资助项目(No.20140203011GX)

摘　　要：研究了一种基于数字微镜器件(DMD)具有新型光路结构的中阶梯光栅光谱仪,并采用新的谱图信息接收方式来降低其使用成本和数据处理过程的复杂程度。将具有单波长选通功能的DMD与一维探测器光电倍增管(PMT)相结合接收中阶梯光栅光谱仪的光谱信息,在降低仪器成本的同时将中阶梯光栅光谱仪谱图还原算法与DMD扫描驱动算法相整合,提高了算法效率。由于DMD的填充因子比CCD稍低,该类光谱仪对成像质量和能量集中度提出了更高的要求。本文根据DMD型中阶梯光栅光谱仪特点,在有限的可挑选的光学材料下,采用多重优化的方式合理设计了中阶梯光栅光谱仪准直镜、中阶梯光栅、棱镜、聚焦镜等各个光学元件的光路结构参数,并且在Czerny-Turner结构中加入校正透镜和场镜,校正了系统所有像差,提高了整个光学系统的成像质量和光谱分辨率。最终设计的光谱仪系统分辨率达0.01nm,单个微反射镜内的光斑能量聚集度达到70%。An echelle spectrometer with a new optical path based on a Digital Micro Device（DMD）was proposed and a new spectrum receiving method was used to reduce the cost of the grating spectrograph and the complexity of data processing.The DMD with single wavelength getting function and an onedimensional photomultiplier（PMT）were combined to receive spectral information of the echelle spectrometer.By which,the cost of the instrument was reduced and the spectral restore algorithm for the echelle spectrometer and the scan driving algorithm for the DMD were integrated to improve algorithm efficiency.Because the fill factor of CCD is lower than that of DMD,this kind of echelle spectrometershould be giving a higher imaging quality and higher imaging energy.According to the characteristics of the echelle spectrometer and the limited range of selected optical materials,the multi-optimization method was employed to design the optical path structure parameters of the echelle spectrometers such as quasi-direct mirror,echelle grating,prism and focusing mirror.Moreover,the Czerny-TurnerC-T structure was added into the system to correct the asymmetric aberration and three correction lenses was used to correct the spherical aberration astigmatism.Finally,the resolution of the designed spectrometer system has reached 0.01 nm and the system imaging energy in one pixel can be 70%.

关 键 词：中阶梯光栅光谱仪 光学设计 数字微镜器件 光电倍增管 

分 类 号：TH744.1[机械工程—光学工程]