光栅复制拼接光路中入射光角度对拼接误差的影响  

Influence of incident light angles on mosaic grating errors in optical path for grating replication and mosaic

作　　者：丛敏 齐向东[1] 糜小涛[1,2] 于海利 李晓天[1] 卢禹先[1,2] CONG Min;QI Xiang-dong;MI Xiao-tao;YU Hai-li;LI Xiao-tian;LU Yu-xian(Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;University of Chinese Academy of Sciences, Beijing 100049, China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《光学精密工程》2017年第12期3027-3033,共7页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.61505204);吉林省青年人才基金资助项目(No.20170520167JH);国家973重点基础研究计划资助项目(No.2014CB049500);国家重大科研装备研制项目(No.ZDYZ2008-1);重大科学仪器设备开发专项(No.2016YFF0103304);国家重点研发计划(No.2016YFF0102006)

摘　　要：设计了一种基于干涉检验法的复制拼接光栅测量光路。针对光栅复制拼接光路中入射光角度难以精确测量的问题,分析了光栅拼接实验中入射光角度对光栅拼接的影响。建立了光栅拼接误差模型,分析了五维拼接误差的容限要求。按照光栅复制拼接光路的要求,设计了一种干涉仪角度调节装置。根据误差模型和拼接光路分析了500mm×500mm大尺寸中阶梯光栅复制拼接光路中入射光角度误差与拼接误差的关系。结果显示:入射光角度误差为1°,拼接光路中绕x轴,y轴的转动误差Δθx,Δθy和沿z轴的位移误差Δz的计算值与实际值之间分别相差0.002 1μrad,0.003 3μrad和0.348 2nm时,引起波前差为2.590 1nm。根据这一计算结果,给出了干涉仪角度调节装置的设计指标,即设置角度调节分度为0.1°时,可满足大尺寸光栅复制拼接要求。A measuring path for grating replication and mosaic was designed based on interferometric method.In consideration of the difficulty of measuring incident light angles in the optical path for grating replication and mosaic,the influence of the angle error of the incident light on the grating replication and mosaic was analyzed.A mathematical model of mosaic grating errors was established,and the tolerance of the mosaic grating errors was given.According the requirement of incident light angle in the optical path for grating replication and mosaic,an angle adjustment structure of the interferometer was designed.On the basis of error mathematical model and the mosaic path,the relation between the incident angle error and the mosaic grating errors was analyzed for a 5 000 mm×500 mmlarge echelle grating.The results show that when the incident angle error is 1°,and the differences of calculation value and actual value for theΔθx,Δθy,Δz（mosaic grating errors around the x,y,zaxes）are 0.002 1μrad,0.003 3μrad,0.348 2 nm,respectively,the wavefront error is 2.590 1 nm.Accroding to the calculation and analysis,it shows that the angle adjustment structure of the interferometer needs a dividing plate of 0.1°as the min measuring range,which can meet the requirement of the grating mosaic.

关 键 词：光栅拼接 光栅复制 拼接误差 误差分析 

分 类 号：O346.1[理学—固体力学]