基于反射差分显微术的有机薄膜空间均一性研究  

Spatial uniformity of organic thin films based on reflectance difference microscopy

作　　者：霍树春[1,2] 胡春光 沈万福[1] 李艳宁 胡小唐[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072 [2]成都工业学院机械工程学院,四川成都611730

出　　处：《红外与毫米波学报》2017年第6期756-760,共5页Journal of Infrared and Millimeter Waves

基　　金：国家重点研发计划项目(2016YFB1102203);优博论文作者专项资金资助项目(201140);国家自然科学基金(61008028);教育部留学回国人员科研启动基金资助项目~~

摘　　要：有机薄膜半导体器件在微电子和光电子领域具有重要的研究与应用价值,其成膜质量是影响器件性能的重要因素,如空间分布的均一性.采用反射差分显微测量方法,对各向异性基底上生长的并五苯薄膜的反射差分显微图像进行分析,研究了该薄膜参数空间分布的非均一性,同时展示了反射差分显微术在薄膜制备检测及工艺研究的应用价值.Organic thin-film semiconductor devices have important applications in the fields of microelectronics and optoelectronics. The film quality is one of the key factors affecting the device performance such as the uniformity of film spatial distribution. This parameter was studied by analyzing the reflectance difference maps of pentacene thin film grown on an anisotropic substrate which were measured by reflectance difference microscopy.

关 键 词：反射差分显微术 各向异性 薄膜质量 偏振光学 

分 类 号：O484.5[理学—固体物理]