气体介质、压强及校准方法对真空漏孔漏率的影响  

Effect of Probe-Gas Type and Pressure and Calibration Method on Leakage Rate Calibration of Deuterium

作　　者：王维[1,2] 钟博扬 叶小球[1] 李芳芳[3] 陈长安[1] 高涛[2] 

机构地区：[1]表面物理与化学重点实验室,江油621908 [2]四川大学原子与分子物理研究所,成都610065 [3]中国工程物理研究院,绵阳621907

出　　处：《真空科学与技术学报》2017年第12期1135-1140,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家磁约束聚变计划专项(No.2015GB109002);中国工程物理研究院科学技术发展基金(No.2014B0301048)

摘　　要：真空标准漏孔作为标定检漏仪或被测量漏率的参考标准,在核工业、航天航空等领域得到了广泛应用。本文利用氦质谱检漏仪和定容法对标准漏孔(铭牌漏率:2.3×10-6Pa·m3/s,He,23℃)进行校准,以为快速地定量研究聚变材料中氘(D2)或氦(He)行为提供有用的参考。研究结果表明,漏孔漏率随入口端气体压强的增大而增大,并与漏孔两端气体介质压强的平方差呈线性递增关系。同一入口压强下,D2的漏率高于He,且漏率之间的差异随压强增加而变大。同一条件下,定容法和氦质谱检漏仪测得漏孔中示漏气体He的漏率值基本相等,但示漏气体为D2时,氦质谱检漏仪测得的漏率值高于定容法。研究还给出了氦质谱检漏仪测量示漏气体D2时漏孔漏率的修正关系式。The effect of the gas-type,pressure and calibration method on the helium and deuterium leakagerate calibration with the commercial leak（2. 3 × 10^-6 Pa·m3/s,He,23℃） was investigated in He-leak detection and constant volume methods. The results show that the probe-gas type,inlet pressure and calibration technique all have a major impact. For example,the leakage-rate increased with an increase of the inlet pressure,proportional to the quadratic difference of the inlet and outlet pressures. At the same inlet pressure,the leakage-rate of D2 was higher than that of He; and an increase of the inlet pressure widened the difference. We found that the probe-gas of D2 resulted in a larger leakage-rate measured in He-leak detection technique than that evaluated in constant volume method,though the probe-gas of He gave the same leakage-rate. The correlation between the results rapidly measured with the two probe gases was derived.

关 键 词：漏率 校准 定容法 氦质谱检漏仪 气体介质 压强 

分 类 号：TB77[一般工业技术—真空技术]