在线APCVD镀膜玻璃渐变过渡层性能研究  

Properties of Gradual Transition Layer of Online APCVD Coated Glass

作　　者：胡铁石 符有杰 赵会峰 张振华 潘国治 姜宏 

机构地区：[1]海南中航特玻材料有限公司特种玻璃国家重点实验室,澄迈571924 [2]海南中航特玻科技有限公司,澄迈571924 [3]海南大学南海海洋资源利用国家重点实验室,海口570228

出　　处：《硅酸盐通报》2017年第12期4157-4162,共6页Bulletin of the Chinese Ceramic Society

基　　金：中航工业通飞科技发展研究项目(TFKY2015002)

摘　　要：通过在线常压化学相沉积镀膜手段制备了FTO玻璃的单层硅/锡混合过渡膜层,并通过各种分析手段测试了可见光透过率、方块电阻、膜层表面结构及纵向元素分布等性能,研究了其结构组成对各项性能的影响。结果表明:膜层中Sn含量由表面至基底玻璃逐渐减小同时Si含量逐渐增加,为良好的SiO_2/SnO_2渐变结构膜层;膜层可见光透过率主要由其膜层结构决定,在一定的范围内,可以通过调整膜层的渐变结构来改变其可见光透过率;表层致密程度及膜层结构渐变可以改善膜层的导电性;可作为FTO镀膜玻璃的过渡层使用。A single layer of Si/Sn hybrid transition film has been prepared by online APCVD coating method on FTO glass,using various methods to test some properties such as transmittance of visible light,square resistance,surface structure and longitudinal element distribution,to study the influence of the structure composition on the properties. The result shows that the content of Sn in the film decreases gradually from the surface to the base glass,and the content of Si increases gradually,it is a good layer of SiO2/SnO2 gradient structure; The transmittance of the visible light is mainly determined by the structure of the film. Within a certain range,the transmittance of the visible light can be changed by adjusting the gradient structure of the film; The density and structure change of the surface layer can improve the conductivity of the film; It can be used as the transition layer of FTO coated glass.

关 键 词：FTO薄膜 过渡层 渐变膜层 在线镀膜 常压化学气相沉积法 

分 类 号：TB43[一般工业技术]