微型光谱仪中传感器S11639的非线性校正  

Nonlinear correction of the sensor S11639 in mini‐spectrometer

作　　者：童建平[1] 高建勋[1] 汪飞 杨浩 

机构地区：[1]浙江工业大学理学院,杭州310023 [2]杭州博源光电科技有限公司,杭州311400

出　　处：《光电工程》2017年第11期1101-1106,共6页Opto-Electronic Engineering

基　　金：国家自然科学青年基金资助项目(11605153)

摘　　要：S11639线阵传感器常被用于需要紫外测量的微型光谱仪中。但当S11639曝光量较大时,会出现光谱响应的非线性,从而影响微型光谱仪的动态范围,因此必须进行非线性校正。利用卤钨灯与氘灯测量微型光谱仪的光电响应特性曲线,找出S11639的曝光量与A/D转换输出的线性部分,对数据进行直线拟合,获得S11639在线性范围内的系数。在此基础上,外推得到其在非线性范围内的理论值,求出理论值与实际测量值的差异,利用最小二乘法进行多项式拟合,实现S11639线阵传感器的非线性校正。同时,对比实验结果,分析实验数据的误差成因,为更好地利用基于S11639微型光谱仪的全动态范围光电检测提供实验依据。Linear array sensor S11639 is often used in mini-spectrometer for UV measurement. However, when the exposure volume of S11639 is relatively bigger, the non-linearity of the spectral response will appear. This nonlinear effect will affect the dynamic range of the mini-spectrometer, and therefore, nonlinear correction must be carried out. Photoelectric response of S11639 is measured with halogen tungsten lamp and deuterium lamp to find out the linear part between the exposure and the A/D conversion output, and straight line fitting of the data is made to obtain the factors of S11639 in the linear range. Based on it, the theoretical value in nonlinear range is got by extrapolation, and the difference between the theoretical value and the actual measurement value was calculated. The nonlinear correction of S11639 is realized by polynomial fitting with the least square method. At the same time, compared with the experimental results, the error causes of the experimental data are analyzed, and the experiment is provided for better utilization of mini-spectrometer based on S11639 for photoelectric detection in the full dynamic range.

关 键 词：微型光谱仪 光谱响应 非线性校正 动态范围 多项式拟合 

分 类 号：TH741[机械工程—光学工程]