一种基于多步法的高精密主轴回转误差分离算法  

A High-precision Spindle Error Separation Algorithm Based on Multi-step Process

作　　者：乔凌霄 陈江宁 陈文会[1] 张丽 田景志 

机构地区：[1]西北工业大学电子信息学院,陕西西安710072 [2]西安轻工业钟表研究所有限公司,陕西西安710061 [3]中航动力股份有限公司计量中心,陕西西安710021

出　　处：《计量学报》2018年第1期6-11,共6页Acta Metrologica Sinica

基　　金：江苏省科委基金(N2015KE0006)

摘　　要：论述了多步法回转误差分离算法的技术原理,提出了频域混合补偿法误差分离算法,通过分析采集到的误差数据中主轴回转误差、圆度误差等成分的频域特性,利用傅里叶变换得到误差的谐波分量,通过剔除、补偿等方式分离偏心误差、圆度误差,从而得到主轴回转误差,该算法能很好地解决谐波抑制问题。通过圆度仪在工作现场采集数据进行仿真分析,实验验证该方法的可行性,并用最小二乘法对结果进行评定。三、四、五步法得到的圆度误差评定值与厂家给出的圆度误差40 nm间的差分别为118 nm、113 nm、145 nm,而频域混合补偿法分离出的圆度误差评定值为54 nm,与40 nm仅相差14 nm,可以看出频域混合补偿法对误差的分离效果明显优于多步法的误差分离效果。Discourse the principle of multi-step rotation error separation algorithm technique is described. The frequency domain mixing compensation error separation algorithm is proposed. By analyzing the frequency domain characteristics of spindle error, roundness error and other components of the collected data,using Fourier transform to obtain harmonic isolated eccentric of error,separate roundness error by way of culling,compensating, the spindle error is given.The algorithm can solve the problem of harmonic suppression. Collecting data using roundness instrument at the job site and giving simulation analysis,verify the feasibility of the method and choose the least squares method as evaluation method.The gap between the roundness error evaluation value of three or four,five step and the roundness error of the manufacturers （40 nm） are respectively 118 nm,113 nm,145 nm,and the evaluation value of the frequency domain compensation method is 54 nm,and the gap is only 14 nm, the separation effect of frequency domain compensation method for error is obviously better than multi-step methods.

关 键 词：计量学 主轴回转误差 高精密主轴 误差分离 频域混合补偿法 谐波抑制 

分 类 号：TB92[一般工业技术—计量学]