聚晶金刚石复合片镜面加工工艺优化研究  

Research on mirror finishing optimization process of polycrystalline diamond compact

作　　者：关佳亮[1] 任勇[1] 赵显辉[1] 路文文 孙晓楠[1] 戚泽海 

机构地区：[1]北京工业大学机械工程与应用电子技术学院,北京100124

出　　处：《现代制造工程》2018年第1期6-10,共5页Modern Manufacturing Engineering

基　　金：国家自然科学基金委员会-中国工程物理研究院联合基金资助项目(10676001)

摘　　要：针对聚晶金刚石复合片精加工后需达到镜面级表面的指标要求,基于正交试验法优化聚晶金刚石复合片精加工工艺参数,采用极差分析法处理试验数据,并绘制试验指标与各试验因素间的关系曲线图,得出了各因素对表面粗糙度的影响规律,并以此为基础优化工艺参数,进行聚晶金刚石复合片镜面加工工艺优化研究。研究表明:抛光盘转速和研抛时间对工件表面粗糙度影响较大,各因素对表面粗糙度的影响程度按从大到小的顺序依次为:抛光盘转速、研抛时间、研抛压力和抛光液磨料粒度。采用优化后的最优工艺参数组合进行加工试验,当研抛压力为90 kPa、抛光盘转速为1 200 r/min、抛光液磨料粒度为1μm、研抛时间为30 min时,得到了表面粗糙度Ra为0.019μm的质量表面,达到了聚晶金刚石复合片镜面加工(Ra<0.02μm)的效果。In order to satisty the requirements of making the surface of polycrystalline diamond compact after finishing bright and clean,like mirror surface, based on the orthogonal test method, it is to optimize polycrystalline diamond compact finishing process parameters combination, using the method of range analysis to process data, and draw test index and the relationship between each experimental factor graph to obtain the influence degree of various factors on the surface roughness value, and as a basis for opti- mization parameters, optimizing the parameters of polycrystalline diamond compact process optimization research. Research showed that the rotation speed and the finishing time put greater impact on the working surface quality, and the influence degree of various factors on the surface roughness size in order from large to small is：polishing disk rotational speed, the time, the polis- hing pressure, and the polishing liquid abrasive granularity. Using the optimized processing test for the optimal process parameters combination, when lapping and pressure is 90 kPa, polishing disk rotational speed of 1 200 r/min, polishing liquid abrasive parti- cle size is 1 μm,and polishing time for 30 min,got the quality of the surface roughness Ra is 0. 019 μm surface,mirror surface treatment effect （Ra 〈 0.02 μm） was realized.

关 键 词：聚晶金刚石复合片 正交试验 工艺优化 

分 类 号：TH16[机械工程—机械制造及自动化] TH161