电涡流方式测量金属薄膜厚度  

Eddy Current Method For Metallic Film Thickness Measurement

作　　者：刘少杰 

机构地区：[1]山东省机械设计研究院,济南250031

出　　处：《现代制造技术与装备》2017年第12期117-118,共2页Modern Manufacturing Technology and Equipment

摘　　要：镀膜行业中,可以采用低频透射式电涡流法测量生产的金属镀膜厚度。根据法拉第电磁感应原理,在镀膜两侧分别放置发射和接收线圈,可以快速准确测量非金属基材上金属薄膜的厚度。与其他方法相比,电涡流法抗干扰能力强,测量范围大,响应速度快。In coating industries, eddy current method with low-frequency transmission can be used measure the thickness of metallic film. According to Faraday law of electromagnetic induction,the thickness of metallic film on non-metal substrates can be measured rapidly and accurately by placing transmitting coils and receiving coils on both sides of coating film. Compared with other measurement methods,eddy current method has advangtages in anti-jamming capability,measuring ranges and response speed.

关 键 词：电涡流法 薄膜测厚 镀膜行业 

分 类 号：TB306[一般工业技术—材料科学与工程]