微型滑块轴承润滑油膜厚度光学测量系统  

An optical system for measuring film thickness of a micro slider bearing

作　　者：李超[1] 白清华[1] 田鹏晖 郭峰[1] 

机构地区：[1]青岛理工大学机械工程学院,山东青岛266520

出　　处：《中国测试》2018年第1期85-88,共4页China Measurement & Test

基　　金：国家自然科学基金(51275252)

摘　　要：针对微型滑块轴承润滑试验研究测量复杂、精度低、不能实时测量等问题,提出一种微型滑块轴承润滑油膜厚度光学测量系统。通过基于平行并联机构的调节装置实现试样与玻璃盘倾角的调节与固定,上位机控制电机带动玻璃盘转动形成动压油膜。通过光栅获取玻璃盘的实时转速,通过双色光干涉法利用光流算法和基于动态时间规整(DTW)算法实现最小膜厚的同步测量。在实验环境中,该系统运行平稳,对于宽度为0.8mm的滑块,倾角调节分辨率为1/7328,利用波长655 nm和532 nm的红绿双色光合成激光作为光源,实现膜厚在线追踪,可满足稳态以及时变的试验要求。To overcome some difficulties in lubricating film measurement of a micro-slider bearing by optical interferometry, such as complicated operation, low accuracy and off-line measurement, a new miero slider bearing film thickness measurement system as well as its structure and measurement principle are introduced. Through the parallel-mechanism-based adjustment device, the inclination angle between the slider and the glass disk can be readily adjusted and set. The glass disk is driven by a motor which accepts the PC＇s order, and then hydrodynamic lubricant films are generated. The real-time velocity of the glass disk is obtained by a grating sensor, and film thickness is measured on-line by optical flow algorithm and dynamic time warping（DTW） based on dichromatic interfermetry. The lab measurement showed that the system could run very stable, and the resolution of inclination angle for the slider of which width is 0.8 mm is 1/7328. With red and green lasers （wavelength 655 nm and 532 nm） as the light source, the online tracking of film thickness is realized, which can meet the requirements for the measurement under both steady-state and time varying conditions.

关 键 词：滑块轴承 油膜厚度 双色光干涉 时变 

分 类 号：TH74[机械工程—光学工程]