面向实用化的片上光阱传感单元  

Practical Sensing Chip Based on Optical Trap

作　　者：葛晓佳 沈瑜 苏鹤鸣 佘玄[1] 胡慧珠[1] 

机构地区：[1]浙江大学光电科学与工程学院现代光学仪器国家重点实验室,杭州310027 [2]浙江科技学院理学院,杭州310023

出　　处：《光子学报》2018年第2期42-48,共7页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.11304282;10947104);中央高校基本科研业务费专项资金(No.2016XZZX004-01)资助~~

摘　　要：提出并实现了一种片式光阱传感单元.利用基片上的V型槽保证双光纤光阱的对准,利用压电元件振动使微球与基片脱离,实现了空气环境中对10μm微球的捕获,捕获后的微球位置稳定性达到0.12μm.在此基础上,设计制作了可预置少量微球的封闭微型腔,实现了光阱传感结构的微型化和集成化,解决了光阱中单微球的高效可重复起振难题,为实现实用化的光阱传感器奠定了基础.A chip of fiber optical trap was investigated, using the V-grooved SiO2 platform to align the fibers and the piezoelectric components to break the constraints between particles and the substrate. After successfully trapping the particle with 10 μm diameter in the air, the axial fluctuation of the particle reaches to the submicron scale （0.12μm）. Furthermore, combined with the micromaehining technology, this paper realizes a sealed micro-cavity to contain few particles that not merely achieves integration into lab-on-a-chip environments but also implements the reproducible launching of a single particle,promoting the application for engineering of optical trap sensing technique.

关 键 词：光纤光阱 悬浮微球 封闭微型腔 静态稳定性 重复起振 

分 类 号：O439[机械工程—光学工程]