大口径薄膜衍射主镜面形误差仿真分析  

Large Aperture Membrane Diffractive Lens Deformation Error Analysis

作　　者：李韬杰 吴鹏[2,3] 杨正 尹韶云[2,3] 杜春雷 汪岳峰[1] 

机构地区：[1]中国人民解放军陆军工程大学电子与光学工程系,石家庄050000 [2]中国科学院重庆绿色智能技术研究院集成光电研究中心,重庆400714 [3]跨尺度制造技术重庆市重点实验室,重庆400714

出　　处：《光子学报》2018年第2期163-172,共10页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.61605208;61475199);中国科学院GF创新基金(No.CXJJ-15M061);航天专用技术预研项目(No.30502010203)资助~~

摘　　要：以理想坐标面为参考面,建立了大口径薄膜衍射主镜面形误差与波前误差的关系模型.首先建立了子镜面形误差模型;其次根据导出的子镜波前误差与大口径薄膜衍射主镜波前误差关系式,分别讨论了边缘褶皱面形和球面面形两种形变情况下不同区域子镜的形变允许范围;最终通过全体子镜的波前误差反向拟合Zernike多项式,得到了不同形变情况下主镜的低阶像差类型.研究结果可为成像系统的像差校正提供理论依据,对大口径薄膜衍射主镜的夹持装配有参考意义.Based on the ideal coordinate surface, a model of large aperture membrane diffractive lens and wavefront aberration was established. Firstly, the model of segmented lens deformation error was built. Secondly, according to the wavefront aberration relationship between segmented lens and large aperture membrane diffractive lens, the deformation error accuracy limitations of the large aperture membrane diffractive lens by segmented lens of different regions was investigated. The edge wrinkle sag and sphere sag were demonstrated. At last, taking wavefront aberration of all segmented lens to fit the Zernike polynomial, the lower order aberration were obtained. This work can provide references for correcting image system aberration and assembling large aperture membrane diffractive lens on engineering.

关 键 词：衍射光学 薄膜 参考面 面形误差 波前误差 

分 类 号：O435[机械工程—光学工程]