亚微米级运动平台结构优化及实现  

Structure optimization and achievement of sub-micron optical motion platform

作　　者：徐聪[1] 段吉安[1] 唐皓[1] 李帅 

机构地区：[1]中南大学高性能复杂制造国家重点实验室,湖南长沙410083 [2]中南大学信息工程学院,湖南长沙410083

出　　处：《中南大学学报（自然科学版）》2018年第1期80-86,共7页Journal of Central South University:Science and Technology

基　　金：国家自然科学基金资助项目(50975293);中南大学研究生自主探索创新项目(2016zzts290)~~

摘　　要：为实现一种直流电机驱动的亚微米级运动平台的设计,并尽量减小其运动误差,采用Simulink-M文件混合仿真的方法,结合Stribeck摩擦模型,探讨运动平台丝杠、同步带的相关结构、精度参数对运动平台精度的影响。通过分析并针对实际使用的要求,进行平台最优结构设计。使用EMAC200控制器和XL-80激光干涉系统对运动平台进行实际测试。研究结果表明:运动平台误差主要受丝杠导程、同步带传动比及它们精度的影响;随着导程减小,传动比增大,精度提高,稳态误差呈减小趋势;当行程为1 mm时,稳态误差在±1.5μm之内,并且可以达到50 nm的实际分辨率;通过Simulink-M文件混合仿真方法,可以实现精密运动平台这种复杂非线性系统的结构优化,提高系统实际的定位精度。In order to design a sub-micro platform driven by DC motor and reduce its motion errors as much as possible, an method which was based on hybrid simulation by Simulink？M and a stribeck friction model, the impact of ball screw and synchronous belt on the motion error was analyzed. The structure was optimized based on the analysis results and the demand. The motion platform was tested with the EMAC 200 controller and XL-80 laser interferometer system. The results show that the motion error is mainly affected by the ball screw’s lead, synchronous belt’s transmission ratio and their accuracy. Error will reduce when the lead decreases, ratio increases as well as their accuracy is improved. The error is within ±1.5 μm when the displacement is 1 mm and a 50 nm actual resolution can be achieved for this platform. The high-precision motion platform, as a complex nonlinear system, can be optimized based on hybrid simulation by Simulink？M.

关 键 词：精密运动平台 Simulink?M混合仿真 结构优化 误差 

分 类 号：TN252[电子电信—物理电子学]