绝对平面检测方法的研究进展  

Research progress of absolute flatness testing

作　　者：黄元申[1,2,3] 吕昊宇 曾媛 韩森[1] 盛斌[1,2,3] 

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093 [2]上海理工大学上海市现代光学系统重点实验室,上海200093 [3]上海理工大学教育部光学仪器与系统工程研究中心,上海200093

出　　处：《光学仪器》2018年第1期72-77,共6页Optical Instruments

基　　金：国家重点研发计划项目(2016YFF0101904)

摘　　要：光学平面的干涉检测发展至今,检测精度已经大大提高,而高精度的平面检测很大程度上受限于参考平面的精度,针对参考平面面形对检测结果的影响,利用绝对平面检测方法,通过多次测量以达到消除参考平面偏差的目的。从测量方式和计算方法两个方面分析了不同绝对平面检测方法的原理,介绍了最新发表的相关成果以及研究动态,并对比了检测结果。这些检测方法已经精确到像素级,并通过多种计算方法使得峰谷(PV)值的计算精度大部分达到了λ/100。The detecting precision has been greatly improved with the development of interference detection for optical planes.The deviation of the reference plane is eliminated via multiple measurements of the absolute plane detection for the reason that high-precision plane testing is constrained by the accuracy of the reference plane.The principles of different absolute plane detection methods from two aspects of measurement method and calculation methods are analyzed.The relevant up-to-date achievements and research trends of these method are introduced with the display of their respective testing results.Detection of these methods has been accurate to the pixel level,and through a variety of computational methods to make the PV value of the calculation accuracy ofλ/100.

关 键 词：光学干涉测量 绝对平面检测 面形精度 

分 类 号：O436.1[机械工程—光学工程] TH744[理学—光学]