基于Terfenol-D材料和光纤光栅法布里珀罗腔的磁场传感器（英文）  

Magnetic Sensor Based on Terfenol-D Materials and Fiber Bragg Grating Fabry-Perot Cavity

作　　者：马瑞 张文涛[1,2] 王兆刚 黄稳柱[1,2] 李芳 

机构地区：[1]中国科学院半导体研究所传感技术国家重点实验室,北京100083 [2]中国科学院大学材料科学与光电技术学院,北京100049

出　　处：《光子学报》2018年第3期194-200,共7页Acta Photonica Sinica

基　　金：The Youth Innovation Promotion Association of CAS(No.2016106);Key R&D Program of China(No.2017YFB0405503)

摘　　要：基于Terfenol-D磁致伸缩材料和光纤光栅法布里珀罗腔,提出了一种用于微弱静态磁场测量的光纤磁场传感器.为了提高传感器的分辨率,采用钕铁硼永磁体提供偏置磁场,同时,采用Monel-400合金与光纤光栅法布里珀罗腔耦合的方式,作为参考元件,对传感器进行温度补偿.实验测得传感器的磁场灵敏度为1.7×10^(-3) pm/μT,磁场分辨率为3.0μT。实验结果表明,本传感器对于静态磁场响应具有良好的线性度和指向性,可用于微弱磁场测量.A fiber optic magnetic sensor for the measurement of weak static magnetic field,based on Terfenol-D materials and Fiber Bragg Grating Fabry-Perot（FBG-FP）cavity,is proposed and demonstrated.In order to improve the sensitivity of the sensor,a NdFeB magnet is used to apply bias magnetic field.To compensate the environmental temperature,another FBG-FP coupled with Monel-400 is used as a reference.The measurement sensitivity of the sensor is 1.7×10^（-3）pm/μT,which results in a magnetic induction resolution of 3.0μT.The experimental results show that the sensor exhibits excellent linearity and directivity in response to static magnetic field.

关 键 词：光纤传感器 光纤布喇格光栅 光纤光栅法布里珀罗腔 磁致伸缩材料 磁场 温度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]