氧化钨纳米线气敏传感器的制备及其室温NO_2敏感特性  

Tungsten oxide nanowire gas sensor preparation and P-type NO_2 sensing properties at room temperature

作　　者：赵博硕 强晓永 秦岳 胡明 

机构地区：[1]天津大学微电子学院,天津300072

出　　处：《物理学报》2018年第5期245-252,共8页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:61271070)资助的课题~~

摘　　要：纳米结构的氧化钨有高比表面积和气体吸附能力,在气体传感器领域得到了广泛研究.本文采用磁控溅射金属钨薄膜和两步热氧化工艺在二氧化硅衬底上生长出氧化钨纳米线.通过改变第二步氧化温度,研究退火温度对氧化钨纳米线气敏特性的影响.采用扫描电子显微镜、X射线衍射仪、X射线光电子能谱分析仪和透射射电子显微镜表征材料的微观特性和晶体结构,利用静态配气法测试气敏性能.研究结果表明,经过退火处理后氧化钨纳米线密度略微降低,300℃比400℃退火后的氧化钨结晶性差,对应的表面态含量多,有利于室温气体敏感性.测试NO_2的气敏性能,经过对比得出300℃退火温度下制备的氧化钨纳米线在室温下表现出较很好的气敏响应,对6 ppm(1 ppm=10^(-6))NO_2达到2.5,对检测极限0.5 ppm NO_2响应达1.37.氧化钨纳米线在室温下表现出反常的P型响应,是因为氧化钨纳米线表面被氧气吸附形成反型层,空穴取代电子成为主要载流子所致.Gas sensor has been widely used to monitor the air quality. Metal oxide semiconductor（MOS） is one of the most popular materials used for gas sensors due to its low-cost, easy preparation and good sensing properties. However, the working temperature of tungsten oxide gas sensor is still high, which restricts its applications in special environment.Researchers try to lower the working temperature of WO3 by doping or changing morphology. Tungsten oxide nanowire has great potential to be applied to the gas sensing field because of its high specific surface area. In this work, onedimensional WO3 nanowire structure is synthesized by sputtering W and followed by the twostep thermally oxidation method. The first step of oxidation is carried out in vacuum tube furnace to obtain the WO2 nanowires and the second step of oxidation is an air annealing treatment in which we will control the temperatures（SO, without treatment;S1,300℃;S2, 400 ℃） to study the morphologies and gas sensing properties. The obtained WO3 nanowires are investigated by field emission scanning electron microscopy（FESEM）, X-ray diffraction（XRD）, X-ray photoelectron spectroscopy（XPS）, and transmission electron microscope（TEM） techniques. The SEM results indicate that WO3 nanowires grow along different directions in space. Nanowires have an average length of 1 μm and a diameter of 40 nm. Besides,nanowires have better crystallinity after higher-temperature（400℃） annealing as indicated by the XRD results, which means less surface defects and surface states. The XPS spectrum indicates the existence of oxygen vacancy in nanowires after 300 ℃ annealing. The TEM results show that nanowires preferred growth direction is changed after different annealing treatments and the crystal lattice of nanowires after 400 ℃ has better order than that of nanowires after300 ℃. The influences of annealing temperature in the second step on the sensing properties to variousconcentration NO2 gases are investigated at working temperature rang

关 键 词：氧化钨 纳米线 NO2气体传感器 响应类型 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]