基于磁梯度场超高分辨的高灵敏加速度传感方法  

High Sensitivity Acceleration Sensing Method Based on the Magnetic Gradient Field Ultrahigh Resolution

作　　者：王磊[1] 郭浩[1] 唐军[1] 刘俊[1] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室

出　　处：《微纳电子技术》2018年第3期172-177,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金重点项目(51635011);国家自然科学基金面上项目(61571406);国家自然科学基金青年基金资助项目(61704158)

摘　　要：报道了一种基于永磁体磁梯度场超高分辨检测机理的加速度传感方法。实验中,通过在聚二甲基硅氧烷（PDMS）柔性薄膜材料中心上表面嵌入永磁体,固定PDMS薄膜周边,悬空永磁体结构,制备了悬臂梁式永磁体质量块结构。通过仿真得到永磁体磁梯度场线性分布区域,并在磁梯度场线性分布区域固定磁检测单元,通过检测永磁体在加速度作用下的微位移引起的磁场变化,实现对加速度信息的传感检测。静态测试结果表明在0.866g-1g的测试范围内,加速度传感灵敏度为4.68 Gs/g,加速度的检测分辨能力近似为93μg。A acceleration sensing method based on the ultrahigh resolution detection mechanism of the magnetic gradient field of the permanent magnet was reported.In the experiment,by embedding the permanent magnet on the upper surface of the polydimethylsiloxane（PDMS）flexible film material center and fixing the periphery of the PDMS film,the permanent magnet was suspended,and then the cantilever beam type permanent magnet mass block structure was prepared.The linear distribution region of the magnetic gradient field for the permanent magnet was obtained by the simulation,and the magnetic detection unit was fixed in the linear region of the magnetic gradient field.By detecting the magnetic field variation caused by the micro displacement of the permanent magnet under the acceleration,the sensing detection of the acceleration information was realized.The static test results show that in the range of 0.866 g-1 g,the acceleration sensing sensitivity is 4.68 Gs/g,and the acceleration detection resolution is approximate to 93μg.

关 键 词：加速度传感方法 磁梯度场 聚二甲基硅氧烷(PDMS)薄膜 重力梯度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH703[自动化与计算机技术—控制科学与工程]