基于基片集成波导的湿度传感器设计  

Design of humidity sensor based on SIW

作　　者：刘勇[1] 陈昌明[1] 高睿 

机构地区：[1]成都信息工程大学通信工程学院,四川成都610225

出　　处：《传感器与微系统》2018年第2期89-91,共3页Transducer and Microsystem Technologies

基　　金：四川省教育厅重点项目(13ZA0087)

摘　　要：采用了边界积分谐振模式展开(BI—RME)方法和Floquet定理相结合的方法,对基片集成波导(SIW)结构进行设计,并利用电磁带隙对敏感区进行构建,用空腔微扰法分析。根据湿度对介电常数的影响引起频率偏移的原理,对谐振器的谐振频率和信号幅度进行测量。实验结果表明:用SIW设计的谐振器的湿度范围为11%~97%RH,灵敏度为13.371~46.51 k Hz/RH,设计的新的微波器件具有较好的研究意义和测量效果。Adopting boundary integral-resonant mode expansion（ BI—RME） method combined with Floquet theorem,design structure of substrate integrated waveguides（ SIW）,and the sensitive region is constructed utilizing electromagnetic band gap structure,and cavity perturbation method is used to analyze. According to the principle of the frequency shift due to the effect of humidity on dielectric constant,the resonator frequency and the signal amplitude of resonator are measured. The test results show that the humidity range of resonator designed by SIW is11 % ~ 97 % RH and the sensitivy characteristics is 13. 37 ~ 46. 52 k Hz/RH. The new microwave component has good research significance and measurement result.

关 键 词：基片集成波导 湿度传感器 介电常数 谐振频率 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]