Polarization-independent all-silicon dielectric metasurfaces in the terahertz regime  

作　　者：HUIFANG ZHANG XUEQIAN ZHANG QUAN XU QIU WANG YUEHONG XU MINGGUI WEI YANFENG LI JIANQIANG GU ZHEN TIAN CHUNMEI OUYANG XIXIANG ZHANG CONG HU JIAGUANG HAN WEILI ZHANG 

机构地区：[1]Center for Terahertz waves and College of Precision Instrument and Optoelectronics Engineering, Tianjin University and the Key Laboratory of Optoelectronics Information and Technology (Ministry of Education), Tianjin 300072, China [2]Physical Science and Engineering Division, King Abdullah University of Science and Technology, Thuwal 23955-6900, Saudi Arabia [3]Guangxi Key Laboratory of Automatic Detecting Technology and Instruments, Guilin University of Electronic Technology, Guilin 541004, China [4]School of Electrical and Computer Engineering, Oklahoma State University, Stillwater, Oklahoma 74078, USA

出　　处：《Photonics Research》2018年第1期24-29,共6页光子学研究（英文版）

基　　金：National Basic Research Program of China(2014CB339800);National Natural Science Foundation of China(NSFC)(61420106006,61422509,61605143,61622505,61675145,61735012);Program for Changjiang Scholars and Innovative Research Team in University(IRT13033);Major National Development Project of Scientific Instruments and Equipment(2011YQ150021);Guangxi Key Laboratory of Automatic Detecting Technology and Instruments(YQ17203)

摘　　要：Dielectric metasurfaces have achieved great success in realizing high-efficiency wavefront control in the optical and infrared ranges. Here, we experimentally demonstrate several efficient, polarization-independent, all-silicon dielectric metasurfaces in the terahertz regime. The metasurfaces are composed of cylindrical silicon pillars on a silicon substrate, which can be easily fabricated using etching technology for semiconductors. By locally tailoring the diameter of the pillars, full control over abrupt phase changes can be achieved. To show the controlling ability of the metasurfaces, an anomalous deflector, three Bessel beam generators, and three vortex beam generators are fabricated and characterized. We also show that the proposed metasurfaces can be easily combined to form composite devices with extended functionalities. The proposed controlling method has promising applications in developing low-loss, ultra-compact spatial terahertz modulation devices.Dielectric metasurfaces have achieved great success in realizing high-efficiency wavefront control in the optical and infrared ranges. Here, we experimentally demonstrate several efficient, polarization-independent, all-silicon dielectric metasurfaces in the terahertz regime. The metasurfaces are composed of cylindrical silicon pillars on a silicon substrate, which can be easily fabricated using etching technology for semiconductors. By locally tailoring the diameter of the pillars, full control over abrupt phase changes can be achieved. To show the controlling ability of the metasurfaces, an anomalous deflector, three Bessel beam generators, and three vortex beam generators are fabricated and characterized. We also show that the proposed metasurfaces can be easily combined to form composite devices with extended functionalities. The proposed controlling method has promising applications in developing low-loss, ultra-compact spatial terahertz modulation devices.

关 键 词：光学 红外范围 通讯技术 半导体 

分 类 号：O43[机械工程—光学工程] TN92[理学—光学]