01005型MLCC关键制备工艺研究  

Study on Key Processes of 01005-Format MLCCs

作　　者：卓金丽 安可荣 陆亨 

机构地区：[1]广东风华高新科技股份有限公司新型电子元器件关键材料与工艺国家重点实验室,广东肇庆526020

出　　处：《电子工艺技术》2018年第1期46-48,57,共4页Electronics Process Technology

基　　金：国家国际科技合作项目(项目编号:2010DFB33920)

摘　　要：为了提高01005型多层陶瓷电容器(MLCC)的切割合格率,对丝印、叠层等关键制备工艺进行了研究。通过试验发现:要获得良好的超小尺寸内电极印刷质量,有必要采用高目数的丝网,还可以适当地缩减电极图案区域以减少电极图案变形。采用具有辅助图案的丝网在介质膜片上印刷内电极,叠层后内电极对位可以满足精度要求。层压需要选择合适的压力和升压速率,防止膜坯巴块发生内部滑移和变形。上述关键工艺的优化为提高01005型MLCC的切割合格率提供了良好的前提条件。In order to raise qualified rate of 01005-format multi-layer ceramic capacitors（MLCCs） after cutting,key processes such as silk screen printing,stacking and so on were studied.It has been found by experiment that it is necessary to adopt silk screen with high mesh number to acquire good quality of ultrasmall electrode printing.Deformation of electrode pattern can be lessened by properly narrowed range of electrode pattern area.Alignment of electrodes can meet the precision demands after stacking by adopting silk screen with assistant pattern to print electrodes on dielectric tapes.To avoid slippage and deformation in green-pressing,selection of proper pressure and pressure rise rate is necessary.Optimization of key processes mentioned above provides good preconditions for raising qualified rate of 01005-format MLCCs.

关 键 词：01005 多层陶瓷电容器 工艺 丝印 内电极 叠层 切割 

分 类 号：TN41[电子电信—微电子学与固体电子学]