Mechanically robust antireflective coatings  

作　　者：Sadaf Bashir Khan Hui Wu Xiaochen Huai Sumeng Zou Yuehua Liu Zhengjun Zhang 

机构地区：[1]The State Key Laboratory for New Ceramics & Fine Processing, School of Materials Science & Engineering, Tsinghua University, Beijing100084, China [2]Advanced Key Laboratory for New Ceramics, School of Materials Science & Engineering, Tsinghua University, Beijing 100084, China

出　　处：《Nano Research》2018年第3期1699-1713,共15页纳米研究（英文版）

基　　金：The authors are grateful to the financial support by the National Basic Research Program of China （973 program, No. 2013CB934301）, the National Natural Science Foundation of China （Nos. 51531006 and 51572148）, the Research Project of Chinese Ministry of Education （No. 113007A）, and the Tsinghua University Initiative Scientific Research Program.

摘　　要：Mechanical strength is an essential parameter that influences and limits the lifetime performance of antireflective （AR） coatings in optical devices. Speciflcally, amphiphobic AR coatings with reduced reflectance are of great significance as they considerably enlarge the range of fundamental applications. Herein, we describe the design and fabrication of amphiphobic AR coatings with reduced reflectance and enhanced mechanical resilience. Introducing a thin polytetrafluoroethylene （PTFE） layer on top of the bilayer SiOz coating via vapor deposition method makes it highly liquid repellent. We achieved reduced reflectance （〈 1%） over the entire visible wavelength range, as well as tunability according to the desired wavelength region. The fabricated film showed better thermal stability （up to 300℃） with stable AR efficiency, when an ultrathin dense coat of Al2O3 was deposited via atomic layer deposition （ALD） on the polymer-based bilayer SiO2 antireflective coating （P-BSAR）. The experimental results prove that the omnidirectional AR coating in this study exhibits multifunctional properties and should be suitable for the production of protective optical equipment and biocompatible polymer films for the displays of portable electronic devices.Mechanical strength is an essential parameter that influences and limits the lifetime performance of antireflective （AR） coatings in optical devices. Speciflcally, amphiphobic AR coatings with reduced reflectance are of great significance as they considerably enlarge the range of fundamental applications. Herein, we describe the design and fabrication of amphiphobic AR coatings with reduced reflectance and enhanced mechanical resilience. Introducing a thin polytetrafluoroethylene （PTFE） layer on top of the bilayer SiOz coating via vapor deposition method makes it highly liquid repellent. We achieved reduced reflectance （〈 1%） over the entire visible wavelength range, as well as tunability according to the desired wavelength region. The fabricated film showed better thermal stability （up to 300℃） with stable AR efficiency, when an ultrathin dense coat of Al2O3 was deposited via atomic layer deposition （ALD） on the polymer-based bilayer SiO2 antireflective coating （P-BSAR）. The experimental results prove that the omnidirectional AR coating in this study exhibits multifunctional properties and should be suitable for the production of protective optical equipment and biocompatible polymer films for the displays of portable electronic devices.

关 键 词：antireflection （AR） super-liquid repellency thin films thermally stable mechanically robust ADHESION 

分 类 号：TN943.6[电子电信—信号与信息处理] TD457[电子电信—信息与通信工程]