单晶SiC抛光用磁流变液稳定性研究及应用  

Study and Application of Magnetorheological Fluid Stability for Single Crystal SiC Polishing

作　　者：童和平[1] 张香红[1] 张洲[1] 谢波[1] 

机构地区：[1]广东理工职业学院,广东广州510091

出　　处：《机电工程技术》2018年第2期126-129,共4页Mechanical & Electrical Engineering Technology

摘　　要：磁流变液是一种新型的流变特性可控的智能液体,具有较强剪切效应而广泛应用于航空航天等领域。通过改性羰基铁粉和原始羰基铁粉性能的试验对比,得出改性羰基铁粉可以改变抗沉降、团聚稳定性等性能,提高磁流变液的稳定性,进而改善单晶SiC基片的抛光质量。Magnetorheological fluid （MRF） is a new kind of intelligent liquid with controllable rheological properties. It has a strong shear effect and is widely used in aerospace and other fields. This study mainly through the contrast test modified carbonyl iron and carbonyl iron powder raw performance, the modified carbonyl iron powder can change the anti reunion settlement, stability and other properties, improve the stability of maguetorheological fluid, thereby improving the polishing quality of SiC single crystal substrate.

关 键 词：磁流变液 单晶SiC 稳定性 羰基铁粉 

分 类 号：TG749[金属学及工艺—刀具与模具]