近场微波显微镜对石墨烯的无损检测研究  

Research on Nondestructive Measurement of Graphene Films Based on NSMM

作　　者：彭坤[1] 吴喆[1] 杨山[1] 柳建龙[1] 曾葆青[1] 

机构地区：[1]电子科技大学物理电子学院,四川成都610054

出　　处：《真空电子技术》2018年第1期39-41,共3页Vacuum Electronics

基　　金：国家自然科学基金(61301053和61601101);中央高校基本科研业务费ZYGX2016J060和ZYGX2016KYQD097

摘　　要：本文基于近场扫描微波显微镜的基本原理,搭建了一套高效测量石墨烯薄膜材料电磁特性的系统。近场扫描微波显微镜是利用探针靠近样品时,记录谐振腔的品质因数或谐振频率的偏移量,然后通过软件仿真探针样品模型的方法得到样品的介电常数、电导率等物理量,以非接触的方式无损表征了石墨烯薄膜的材料特性。We build up a near-field scanning microwave microscope（NSMM）which can test the properties of thin film.By detecting the Q factor of resonant cavity and the offset of the resonant frequency when probe is close to samples,physical characteristics including dielectric constant and electrical conductivityof samples can be obtained effectively with software-simulating.Material properties of graphene films were characterized by non-contact test method.

关 键 词：石墨烯 检测 近场扫描微波显微镜 

分 类 号：TN107[电子电信—物理电子学]