Temperature Compensation Fiber Bragg Grating Pressure Sensor Based on Plane Diaphragm  

作　　者：Minfu LIANG Xinqiu FANG Yaosheng NING 

机构地区：[1]Key Laboratory of Deep Coal Resource Mining, Ministry of Education of China, School of Mines, China University of Mining and Technology, Xuzhou, 221116, China

出　　处：《Photonic Sensors》2018年第2期157-167,共11页光子传感器（英文版）

摘　　要：Pressure sensors are the essential equipments in the field of pressure measurement. In this work, we propose a temperature compensation fiber Bragg grating （FBG） pressure sensor based on the plane diaphragm. The plane diaphragm and pressure sensitivity FBG （PS FBG） are used as the pressure sensitive components, and the temperature compensation FBG （TC FBG） is used to improve the temperature cross-sensitivity. Mechanical deformation model and deformation characteristics simulation analysis of the diaphragm are presented. The measurement principle and theoretical analysis of the mathematical relationship between the FBG central wavelength shift and pressure of the sensor are introduced. The sensitivity and measure range can be adjusted by utilizing the different materials and sizes of the diaphragm to accommodate different measure environments. The performance experiments are carried out, and the results indicate that the pressure sensitivity of the sensor is 35.7pm/MPa in a range from 0MPa to 50MPa and has good linearity with a linear fitting correlation coefficient of 99.95%. In addition, the sensor has the advantages of low frequency chirp and high stability, which can be used to measure pressure in mining engineering, civil engineering, or other complex environment.Pressure sensors are the essential equipments in the field of pressure measurement. In this work, we propose a temperature compensation fiber Bragg grating （FBG） pressure sensor based on the plane diaphragm. The plane diaphragm and pressure sensitivity FBG （PS FBG） are used as the pressure sensitive components, and the temperature compensation FBG （TC FBG） is used to improve the temperature cross-sensitivity. Mechanical deformation model and deformation characteristics simulation analysis of the diaphragm are presented. The measurement principle and theoretical analysis of the mathematical relationship between the FBG central wavelength shift and pressure of the sensor are introduced. The sensitivity and measure range can be adjusted by utilizing the different materials and sizes of the diaphragm to accommodate different measure environments. The performance experiments are carried out, and the results indicate that the pressure sensitivity of the sensor is 35.7pm/MPa in a range from 0MPa to 50MPa and has good linearity with a linear fitting correlation coefficient of 99.95%. In addition, the sensor has the advantages of low frequency chirp and high stability, which can be used to measure pressure in mining engineering, civil engineering, or other complex environment.

关 键 词：Fiber Bragg grating plane diaphragm temperature compensation pressure sensor performanceexperiment low frequency chirp 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN253[自动化与计算机技术—控制科学与工程]