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作 者:韩旭峰[1] 潘开林[1] 曹威武 王文佳[1] 李婷婷[1] Han Xufeng,Pan Kailin,Cao Weiwu,Wang Wenjia,Li Tingting(School of Mechanical and Electrical Engineering, Guilin University of Electronic Technology, Guilin 541004, Chin)
机构地区:[1]桂林电子科技大学机电工程学院
出 处:《微纳电子技术》2018年第4期290-295,301,共7页Micronanoelectronic Technology
基 金:国家自然科学基金资助项目(61474032)
摘 要:运用分形几何学设计了可双轴拉伸的Peano型通用互连结构。运用能量法推导了一阶Peano型通用互连结构对角方向的拉伸与弯曲位移。根据一阶Peano型与二阶Peano型的分形几何关系,推导了二阶Peano型通用互连结构对角拉伸刚度。通过数值计算结果与有限元仿真结果进行对比验证,两者吻合良好。分析表明:对于Peano型通用互连结构在对角拉伸的情况下,其圆弧的开口与半径越大,同时在直线段与斜线段不影响应力集中的前提下,适当提高直线段和斜线段的长度,其互连结构的延展性越好。A Peano-type general interconnect structure with biaxial stretch was designed by the fractal geometry.The displacements of stretch and bend of the first-order Peano-type general interconnection structure at diagonal direction were derived by the energy method.According to the relationship between the first-order Peano-type fractal geometry and second-order one,the diagonal tensile stiffness of the second-order Peano-type general interconnection structure was deduced.By comparison and verification of the numerical calculation result and finite element simulation result,both are in good agreement.The analysis shows that in the case of the diagonal stretch for the Peano-type general interconnection structure,when the line segment and oblique line segment do not affect the accumulation of stress,the length increases of the line segment and oblique line segment can improve the ductility of the interconnection structure,the larger the arc opening and radius are,the better the interconnection structure ductility is.
关 键 词:可延展电子 拉伸刚度 弯曲刚度 Peano型分形几何学 通用互连结构
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