氧等离子体处理ZnO纳米纤维材料的制备及其对丙酮气敏性能的研究  

The Preparation and Acetone Gas Sensing Properties of ZnO Nanofiberstreated by Oxygen Plasma

作　　者：王惠生 杜海英[2] 王小风 王兢 WANG Huisheng1, DU Haiying2, WANG Xiaofeng3, WANG jing1(1. Faculty of Electronic Information and Electrical Engineering,Dalian University of Technology, Dalian Liaoning 116023, China ; 2. College of Electromechanical and Information Engineering ,Dalian Nationalities University,Dalian Liaoning 116600, China; 3. Department of Basic Education, P anjin , Dalian University of Technology, Dalian Liaoning 124000, China)

机构地区：[1]大连理工大学电子信息与电气工程学部,辽宁大连116023 [2]大连民族大学大连民族学院机电信息工程学院,辽宁大连116600 [3]大连理工大学盘锦校区基础部,辽宁盘锦124000

出　　处：《传感技术学报》2017年第12期1800-1807,共8页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(61574025;61501081;51602035)

摘　　要：采用静电纺丝法制备了ZnO纳米纤维材料并使用氧等离子体对其进行表面处理。通过X射线衍射(XRD),扫描电子显微镜(SEM),BET比表面积测试以及X射线光电子能谱分析(XPS)等手段对样品的结构与形貌进行了表征分析。将氧等离子体处理前后的ZnO纳米纤维分别制成气体传感器,对浓度为1×10-6~100×10-6(体积分数)丙酮气体的敏感特性进行了测试分析。测试结果表明,氧等离子体处理后的ZnO纳米纤维响应值较未处理的ZnO纳米纤维有大幅度的提升,最佳工作温度也有所降低,且对甲醛、苯、甲苯、二甲苯等几种干扰气体表现出更好的选择性。从晶粒间势垒和耗尽层厚度等角度初步分析了氧等离子体处理改善ZnO气敏特性的机理。ZnO nanofibers were synthesized by an electrospinning method and subsequently treated by oxygen plasma. The structure and morphology of the samples were characterized using X-ray diffraction（ XRD）,scanning electron microscopy（ SEM）,Brunner-Emmet-Teller（ BET） measurements and X-ray photoelectron spectroscopy（ XPS）.The sensitivity of the plasma treated and untreated ZnO nanofibers towards acetone from 1 × 10-6 to 100 × 10-6（ volume fraction） was investigated. It was found that the gas sensing properties of ZnO nanofibers to acetone vapor obviously improved after it treated by oxygen plasma,such as decreasing the operating temperature and enhancing the response value. Meanwhile,the responses of the treated ZnO nanofibers sensor to formaldehyde,benzene,xylene and methylbenzene decrease,indicating an improved selectivityand anti-disturbance from interference to acetone vapor. The improvement mechanism of ZnO nanofibers treated by oxygen plasma is analyzed briefly by means of depletion layer thickness and potential barriers between grains.

关 键 词：气体传感器 氧等离子体 ZnO纳米纤维 改性机理 丙酮 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]