超精密液体静压回转工作台研制  

Development of ultra-precision liquid hydrostatic rotary table

作　　者：胡秋[1] 汪俊文[1] 袁南南[1] 王宝瑞[1] HU Qiu, WANG Junwen, YUAN Nannan, WANG Baorui(Laboratory of Ultra-sophisticated Machining, Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Mianyang 621900, CH)

机构地区：[1]中国工程物理研究院机械制造工艺研究所超精密加工技术重点实验室,四川绵阳621900

出　　处：《制造技术与机床》2018年第4期156-159,共4页Manufacturing Technology & Machine Tool

基　　金：国家重大科学仪器设备开发专项(2011YQ130043);中国工程物理研究院超精密加工技术重点实验室基金重点项目(K855.K856);中国工程物理研究院909重大科技专项(9020602)

摘　　要：对某高精度立式磨床用回转工作台采用液体静压直驱转台总体技术方案以保证其良好的动态特性和回转精度;支承系统采用液体静压支承以获得高的承载能力、刚度以保证工艺系统刚性;针对转台高动态回转精度要求,考虑油膜误差均化,确定了其关键零件部件精度并采用手工研磨方式保证了其制造精度,实现了转台系统全转速范围内0.25 μm动态回转精度;针对电动机发热和油膜剪切发热,采用稀油大流量静压支承、止推上置电动机下置、电动机强冷等技术措施保证了回转工作台良好的热态特性,工作端热伸长小于4 μm。研制的静压回转工作台应用于立式磨床,实现了外圆内孔圆度0.45 μm的磨削精度。The hydrostatic direct drive total technical scheme of the rotary table applied for a vertical grinder, which was dedicated to grind the sleeve parts of high-precision spindles, was carried out. Both radial bearings and thrust bearings of the table obtained high load capacity and stiffness through hydrostatic bearing, which ensured the rigidity of grinding process system. In allusion to high dynamic rotating ac- curacy requirements of the table, the oil film error homogenization is considered, the accuracy of key parts and components was determined and hand- grinding method was adopted to ensure its manufacturing precision, by these technical measures, the rotary table achieved dynamic rotation accu- racy of 0. 25 μm within the whole speed range. In allusion to heat produced by friction of oil film and motor power consumption, technical measures such as high-flow light oil hydrostatic bearings, thrust bearings above and motor down are applied, thermal elongation of the working end was less than 4 μm, which ensured good thermal properties of the table. Developed hydrostatic rotary table was applied to vertical grinder, which achieved the grinding precision of 0. 45 μm roundness for the excircle and the in- nerbore.

关 键 词：立式磨床 静压回转工作台 支承设计 精度设计 热态特性 

分 类 号：TG502[金属学及工艺—金属切削加工及机床]