基于量子遗传算法的宽带离散化极紫外多层膜的研制  

Design and Fabrication of Broadband Discrete Extreme-ultraviolet Multilayer Based on Quantum State Genetic Algorithm

作　　者：匡尚奇[1] 张超[1] 李硕 杨海贵 霍同林[3] 周洪军[3] KUANG Shang-qi1 , ZHANG Chao2 , LI Shuo1 , YANG Hai-gui2 , HUO Tong-lin3, ZHOU Hong-juna(1 School of Science, Changchun University of Science and Technology, Changchun 130022, China） （2 Advanced Manufacturing Technology for Optical Systems Laboratory, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;3 National Synchrotron Radition Laboratory, University of Science and Technology of China, Hefei 230029, China)

机构地区：[1]长春理工大学理学院,长春130022 [2]中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室,长春130033 [3]中国科学技术大学国家同步辐射实验室,合肥230029

出　　处：《光子学报》2018年第4期46-54,共9页Acta Photonica Sinica

基　　金：国家自然科学基金青年基金(No.61405189);吉林省科技发展计划(Nos.20150101019JC;20170312024ZG)资助~~

摘　　要：提出了一种基于量子遗传算法的宽带极紫外多层膜的离散化设计方法,解决了在膜系设计中普遍采用的遗传算法存在求解精度低的问题.同时在基于量子遗传算法的膜系设计方法中对膜系进行了离散化设计,解决了在仅由时间控制膜厚且沉积速率较大的镀膜系统中的膜厚高精度控制的问题.依据量子遗传算法的膜系设计结果采用磁控溅射镀膜系统镀制宽带极紫外多层膜.测试结果表明,宽角度极紫外多层膜的入射角为0°~15°,反射率达45%以上;宽光谱极紫外多层膜的入射波长为13~15nm,反射率达20%以上.相关研究工作为宽带极紫外多层膜的研发提供了另一种可供选择的且较优的搜索优化算法,同时该算法结合实验,实现膜厚的离散化设计,使镀制出的多层膜具有较好的光谱性能.Quantum state genetic algorithm was applied into the discrete design of broadband extremeultraviolet multilayer to solve the problem of solving accuracy in genetic algorithm.And the discrete design of layer thickness can be achieved in the process of quantum state genetic algorithm.It solves the problem that the layer can be accurately fabricated when the magnetron sputtering system is controlled by the deposition time.According to the results designed by quantum state genetic algorithm,broadband extreme-ultraviolet multilayers have been fabricated by magnetron sputtering system.The measured results show two kinds of multilayers designed by quantum state genetic algorithm were fabricated,one has a reflectivity of more than 45% in the 0°~15° range of incidence angle,and the other reaches the reflectivity of more than 20% for the wavelength range from 13 nm to 15 nm.The relative work shows the potential value of quantum state genetic algorithm and offers another alternative optimizing algorithm in the field of broadband extreme-ultraviolet multilayer design.And then the algorithm can achieve the discrete design of multilayer,which makes fabricated multilayer have better spectral properties.

关 键 词：光学多层膜 膜系设计 量子遗传算法 宽带极紫外多层膜 离散化设计 

分 类 号：O434[机械工程—光学工程]