皮秒激光微纳加工304不锈钢形貌调控  

Morphological Adjustment of 304 Stainless Steel by Picosecond Laser Micro-Nano Fabrication

作　　者：谢志伟 董世运[2] 闫世兴[2] 李恩重[2] 汪宏斌[1] 李重河[1] Xie Zhiwei1, Dong Shiyun2, Yan Shixing2, Li Enzhong2, Wang Hongbin1, Li Chonghe1(1 School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China ; 2 National Key Laboratory for Remanufacturing, Academy of Armored Forces Engineering, Beijing 100072, Chin)

机构地区：[1]上海大学材料科学与工程学院,上海200072 [2]装甲兵工程学院装备再制造技术国防科技重点实验室,北京100072

出　　处：《激光与光电子学进展》2018年第3期343-350,共8页Laser & Optoelectronics Progress

基　　金：国家重点研发计划(2016YFB1100205);北京市科技专项(Z161100004916009);北京市科技计划(Z161100001516007)

摘　　要：通过皮秒激光对304不锈钢表面进行刻蚀获得了光栅微纳结构,分析了该微纳结构的尺寸及该不锈钢的表面形貌,研究了不同激光加工参数对微纳结构的影响。结果表明,平均功率对激光烧蚀率及光栅微纳结构尺寸具有显著影响;增大扫描速率,光栅微纳结构深度减小,宽度基本保持不变,激光烧蚀率呈不规则波动;加工次数的增大则会减小激光烧蚀率。激光加工不锈钢表面制备微纳结构的较优工艺条件为高平均功率、较大扫描速率和小加工次数,在该工艺条件下微纳加工不锈钢表面获得了超疏水性能。The grating micro-nano structure is fabricated by picosecond lasers on the 304 stainless steel surface. The size of this micro-nano structure and the surface morphology of this processed stainless steel are characterized. The influences of different laser processing parameters on the micro-nano structure are studied. The result shows that the average power has a significant influence on the laser ablation rate and the size of grating micro-nano structure. If the scanning speed increases, the depth of the grating micro-nano structure decreases, while the width remaines unchanged and the laser ablation rate shows an irregular fluctuation. The laser ablation rate decreases if the processing times increase. The better process conditions for fabricating micro-nano structures on the stainless steel surface are as follows： high average power, high scanning speed and low processing times, under which the superhydrophobic surface of stainless steel can be obtained successfully.

关 键 词：激光技术 激光加工 形貌调控 微纳结构 加工参数 皮秒激光 

分 类 号：TN249[电子电信—物理电子学]