一种中红外带间级联激光甲烷传感器的研制  

Development of a Mid-Infrared Interband Cascade Laser Methane Sensor

作　　者：郑文雪[1] 郑传涛[1] 姚丹 杨硕 党佩佩 王一丁[1] Zheng Wenxue, Zheng Chuantao, Yao Dan, Yang Shuo, Dang Peipei, Wang Yiding(State Key Laboratory on Integrated Optoelectronics, Jilin University Region, College of Electronic Science and Engineering, Jilin University, Changchun, Jilin 130012, Chin)

机构地区：[1]吉林大学集成光电子学国家重点联合实验室吉林大学实验区,电子科学与工程学院,吉林长春130012

出　　处：《光学学报》2018年第3期166-171,共6页Acta Optica Sinica

基　　金：国家重点研发计划课题(2016YFD0700101,2016YFC0303902)、国家自然科学基金(61775079,61627823,61307124)、吉林省科技发展计划项目(20140307014SF)、吉林省省级产业创新专项资金项目(2017C027)、长春市科技发展计划项目(11GH01,14KG022)

摘　　要：甲烷(CH_4)是大气环境监测、工业过程控制、煤矿生产安全等多个领域中需重点监测的气体之一,研制CH_4传感器具有广泛的应用价值。利用CH_4分子在3.31μm附近的基频吸收带并选择其在3038.5cm^(-1)的吸收线作为目标谱线,研制了一种基于中红外室温、连续、单模带间级联激光器(ICL)的CH_4传感器。该传感器采用可调谐激光直接吸收光谱技术以及长光程(54.6m)吸收光谱技术测定CH_4气体浓度。自主研制了高灵敏、低功耗的激光器温度控制器和电流驱动器,编写了基于LabVIEW的数据产生、采集与处理程序。利用体积分数为2.1×10^(-6)的CH_4标准气体和气体稀释系统配备了不同浓度的CH_4气体样品,开展了传感器的性能测试实验。根据传感器标准差的分析结果,当采样周期为2.5s时,传感器的1σ检测下限约为1.1×10^(-8)。利用该传感器对室外大气中CH_4浓度进行了连续84h的监测,结果证实了所研制CH_4传感器的工程实用价值。Methane （CH4） is one of the most important gases to be monitored in many fields such as atmospheric environment monitoring, industrial process control and coal mine production safety. Developing CH4 sensor has a wide application value. Based on the fundamental frequency absorption band of CH4 molecule near 3.31 μm and its absorption line at 3038.5 cm-1 as the target line, a CH4 sensor based on the mid-infrared room-temperature, continuous and single-mode interband cascaded laser （ICL） is developed. The sensor uses tunable laser direct absorption spectroscopy and long-path （54.6 m） absorption spectroscopy to measure CH4 gas concentrations. A high sensitivity, low power laser temperature controller and current driver are developed independently, and the program of data generation, acquisition and processing based on LabVIEW is coded. The CH4 standard gas with a volume fraction of 2.1×10-6 and a gas dilution system are used to prepare CH4 gas samples with different concentrations. And the performance test of the sensor is conducted. According to the analysis of the standard deviation of the sensor, when the sampling period is 2.5 s, the lower 1σ detection limit of the sensor is about 1.1×10-8. The sensor is used to monitor the concentration of CH4 in the outdoor air for 84 h continuously. The results confirm the engineering practical value of the developed CH4 sensor.

关 键 词：传感器 激光光谱学 甲烷传感器 红外吸收光谱 带间级联激光器 

分 类 号：TH83[机械工程—仪器科学与技术]