气体放电等离子体及应用的研究进展  

GAS DISCHARGE PLASMAS AND THEIR APPLICATIONS

作　　者：石峰 王昊 SHI Feng;WANG Hao(School of Physics and Electronic Information Engineering, HenanPolyiechnicUniversity,Jiaozuo Henan 454000,Chin)

机构地区：[1]河南理工大学物理与电子信息学院,河南焦作454000

出　　处：《真空与低温》2018年第2期80-85,共6页Vacuum and Cryogenics

基　　金：国家自然科学基金(61501175);河南理工大学博士基金(B2017-56)

摘　　要：由于气体放电在材料处理、热核聚变、环境净化以及等离子体推力器等各个前沿科学领域中具有广泛的应用。为了推动气体放电及等离子体理论与应用技术的研究和发展,综述了近年来各种典型气体放电机理的发展。分析了直流辉光放电、介质阻挡放电、大气压辉光放电、电子回旋共振放电、容性耦合射频放电的国内外研究现状,最后介绍了气体放电等离子体的应用领域。Gas discbm-ge is tile main way to produce low temperature plaslna, and exists widely in people＇s daily life. Its developlnent has a great impact on tile developlnent of high-tech econolny and tile transforlnation of traditional indus- tries. In this paper, tile classification and principle of gas discharge, the conditions of discharge and Characteristics of gas discharge plasma are described. Finu11y,the application fields of gas discharge plasma are introduced.

关 键 词：气体放电 直流放电 射频放电 介质阻挡放电 容性耦合射频放电 等离子体应用 

分 类 号：O53[理学—等离子体物理]