真空测量装置的流导对测量真空度的影响  

EXPERIMENTAL STUDY ON THE EFFECT OF THE FLOW CONDUCTANCE OF THE VACUUM MEASUREMENT STRUCTURE ON THE VACUUM MEASUREMENT

作　　者：李安康 谭浩 黄欢明[2] LI An-kang;TAN Hao;HUANG Huan-ming(Military Representative Office in Shanghai Marine Diesel Engine Research Institute, Shanghai 201108, China;Shanghai Marine Diesel Engine Research Institute, Shanghai 201203, China)

机构地区：[1]海军驻上海711所军事代表室,上海201108 [2]上海船用柴油机研究所,上海201203

出　　处：《真空与低温》2018年第2期137-141,共5页Vacuum and Cryogenics

摘　　要：夹层真空度是影响低温容器真空绝热性能的主要因素。真空度测量结果不仅与真空规管本身的测量精度有关,还与真空测量装置的流导有关。搭建了真空测量系统,设计两种不同流导的真空测量装置,模拟高真空多层绝热低温容器真空测量系统的实际工况,测量这两种装置下的真空度并进行分析。结果表明真空测量装置的流导大小对该装置的真空度测量有较大影响,流导大的测量装置需要较短的抽气时间就能保证该装置上规管的测量值有较好的精度。结果可为低温容器真空测量系统的设计、试验和使用提供参考。The interlayer vacuum is tile main factor that affects tile vacuum insulation perfolanance of the cryogelffC vessel. Tile result of vacuum measurement is not only related to tile measurement accuracy of tile vacuum gauge, but also to the flow conductance of the vacuum measurement structure. Tile vacuum measurement system was built and two different flow conductonce of tile vacuum measurement structure were designed. In the experilnent, tile actual situations of tile vacuum measurement system were simulated in tile high vacuum multilayer insulated ci3sogenic vessel. The vacuum under tile two structures were measured and analyzed. Tile results show that tile flow conductance of the vacuum measurement stnlcture greatly affects its vacuum measurement. Large flow conductance of tile stnlcture cai1 ensure better accuracy of tile result measured by tile vacuum gauge on tiffs structure in shorter pumping time. The analysis results provide certain references to design, experiment and usage of the vacuum measurement system of tile cryogelffC vessel.

关 键 词：真空度 流导 真空测量装置 低温容器 真空规管 

分 类 号：TB771[一般工业技术—真空技术]