适应温度变化的石英晶体微天平微小颗粒测量技术  

Quartz Crystal Microbalance Measurement Technology for Tiny Particles Adapted to Temperature Variation

作　　者：徐晓冬[1] 魏列江[1,2] 强彦 XU Xiaodong;WEI Liejiang;QIANG Yan(College of Energy and Power Engineering,Lanzhou University of Technology, Lanzhou 730050, China;Key Laboratory of Fluid Machinery and System of Gansu Province, Lanzhou 730050, China)

机构地区：[1]兰州理工大学能源与动力工程学院,兰州730050 [2]甘肃省流体机械及系统重点实验室,兰州730050

出　　处：《传感技术学报》2018年第2期185-189,共5页Chinese Journal of Sensors and Actuators

基　　金：甘肃省科技计划项目(148RJYA005);兰州市科技计划项目(2015-3-98)

摘　　要：在石英晶体微天平QCM(Quartz Crystal Microbalance)表面涂敷粘性(Sticking)聚合物形成粘性薄膜QCM(SQCM),有利于实现微小颗粒的精确测量,但测量结果受温度影响较大。针对该问题,基于SQCM简谐振动力学模型的分析,建立了粘性薄膜弹性系数与温度之间的关系,有效反映温度变化对SQCM谐振角频率的影响。在-25℃~60℃温度变化范围内进行了实验测试,分别拟合了SQCM空载频-温特性曲线和带载质量灵敏度系数-温度曲线,形成查询修正的依据,从而使得SQCM测量微小颗粒具有宽温度范围的适应性和准确性。Coating sticking film on the surface of a quartz crystal microbalance（QCM）could form SQCM,which was conducive to the realization of accurate measurement of tiny particles,but the SQCM measurement results were affected by the temperature.Aiming at this problem,according to the analysis on the simple harmonic motion of the SQCM model,the relationship between the temperature and the elastic coefficient of the sticking film was established,so as to effectively reflect the influence of the temperature on the SQCM resonant angular frequency.With the analysis on experiment results,the SQCM no-load frequency-temperature characteristic curve and the mass sensitivity coefficient-temperature curve with load were fitted in the temperature range of-25℃~60℃,which formed the basis for inquiry and modification,so as to make the SQCM measurement for tiny particles adaptable and accurate with wide temperature range.

关 键 词：石英晶体微天平 粘性薄膜 简谐振动 频温特性 微小颗粒 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]