FU+MAU+DCC系统在电子洁净厂房中的应用  

作　　者：张鹏飞 

机构地区：[1]北京中瑞电子系统工程设计院有限公司,北京100000

出　　处：《科技创新与应用》2018年第13期20-21,24,共3页Technology Innovation and Application

摘　　要：在TFT面板的电子洁净厂房中,模组工艺制程的后工程仅需要温湿度要求。传统的空调形式组合空调AHU+净化新风MAU,需要的空调站房面积大,管道系统复杂,吊顶空间要求高,空调能耗高等特点给设计师带来巨大的挑战。为此创新了空调形式FU+MAU+DCC即风机送风单元+净化新风+干表冷系统。文章将结合已经投入生产的实际工程,阐述新系统的应用。以供洁净室设计师多个系统方案的选择。In the electronic clean workshop of TFT panel, only temperature and humidity are required for the rear engineering of the module process. The traditional air conditioning form combination air conditioning AHU＋ purifying fresh air MAU, requests that the air conditioning station room area should be large, the pipeline system be complex, the ceiling space request be high, the air conditioning energy consumption be high and so on; the characteristics bring the huge challenge to the designer. For this reason, the air conditioning form FU＋MAU＋DCC is innovated, that is, fan＇s air supply unit ＋ purifying fresh air ＋ dry watch cooling system. This paper will explain the application of the new system in the light of the actual project that has already been put into production, for cleanroom designers to choose from multiple system options.

关 键 词：电子洁净厂房 模组工程 空调系统形式 FU 低洁净度的电子组装车间 

分 类 号：V268.1[航空宇航科学与技术—航空宇航制造工程]